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Mathematical simulation of a membrane capacitive compensation pressure transducer

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Abstract

The operation of a membrane capacitive pressure transducer with electrostatic compensation of the membrane deformation has been mathematically simulated. It is shown that the theory describing these instruments is incorrect and the error in measuring pressure by them may be as high as 25–29% of the measured value, which makes them inappropriate for use in pressure metrology.

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Author information

Authors and Affiliations

  1. St. Petersburg State University, St. Petersburg, 199034, Russia

    A. I. Eikhval’d

  2. D.I. Mendeleyev Institute for Metrology, St. Petersburg, 190005, Russia

    I. V. Sadkovskaya & T. A. Eikhval’d

Authors
  1. A. I. Eikhval’d
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  2. I. V. Sadkovskaya
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  3. T. A. Eikhval’d
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Corresponding author

Correspondence to A. I. Eikhval’d.

Additional information

Original Russian Text © A.I. Eikhval’d, I.V. Sadkovskaya, T.A. Eikhval’d, 2016, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2016, Vol. 42, No. 15, pp. 1–6.

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Eikhval’d, A.I., Sadkovskaya, I.V. & Eikhval’d, T.A. Mathematical simulation of a membrane capacitive compensation pressure transducer. Tech. Phys. Lett. 42, 769–771 (2016). https://doi.org/10.1134/S1063785016080071

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  • DOI: https://doi.org/10.1134/S1063785016080071

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