Abstract
Submicron thin layers of BaZr x Ti1–x O3 are grown in-situ by RF magnetron sputtering of a ceramic target (x = 0.50) on a substrate of Pt/r-cut leucosapphire Al2O3. It is shown that the composition of the ferroelectric layer is not identical to the composition of the sputtered target and is shifted toward barium zirconate. The reasons for such behavior are discussed. The obtained samples are characterized by high breakdown voltages (1 MV/cm and higher). The structural and high-frequency dielectric properties are studied, and high tunability of the capacitance of thin layers is revealed.
Similar content being viewed by others
References
R. C. Kell and N. J. Hellicar, Acta Acustica united with Acustica 6 (2), 235 (1956).
S. D. Hennings, A. Schell, and G. Simon, J. Amer. Ceram. Soc. 65, 539 (1982).
A. K. Tagantsev, V. O. Sherman, K. F. Astafiev, J. Venkatech, and N. Setter, J. Electroceram. 11, 5 (2003).
I. P. Pronin, B. A. Rotenberg, A. V. Sotnikov, and E. A. Tarakanov, Ferroelectrics 224, 219 (1999).
B. A. Rotenberg, Ceramic Capacitor Dielectrics (RFFI, Moscow, 2000).
A. Dixit, S. B. Majumder, P. S. Dobal, R. S. Katyar, and A. S. Bhalla, Thin Solid Films 447–448, 284 (2004).
D. Y. Wang, P. Yun, Y. Wang, H. L. W. Chan, and C. L. Choy, Thin Solid Films 517, 2092 (2009).
S.-J. Lee, M.-H. Kwak, S. E. Moon, H.-C. Ryu, Y.-T. Kim, and K.-Y. Kang, Integr. Ferroelectr. 77, 93 (2005).
T. Maiti, R. Guo, and A. S. Bhalla, Appl. Phys. Lett. 89, 122909 (2006).
S. Hoffmann and R. M. Waser, Integr. Ferroelectr. 17, 141 (1997).
V. Reymond, S. Payan, D. Michau, J.-P. Manaud, and M. Maglione, Thin Solid Films 467, 54 (2004).
A. B. Kozyrev, M. M. Gaidukov, A. G. Gagarin, A. G. Altynnikov, S. V. Razumov, and A. V. Tumarkin, Tech. Phys. Lett. 35 (7), 585 (2009).
V. A. Volpyas and A. B. Kozyrev, J. Exp. Theor. Phys. 113 (1), 172 (2011).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © A.V. Tumarkin, S.V. Razumov, A.G. Gagarin, A.G. Altynnikov, V.M. Stozharov, E.Yu. Kaptelov, S.V. Senkevich, I.P. Pronin, 2016, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2016, Vol. 42, No. 3, pp. 61–67.
Rights and permissions
About this article
Cite this article
Tumarkin, A.V., Razumov, S.V., Gagarin, A.G. et al. The structure and dielectric properties of thin barium zirconate titanate films obtained by RF magnetron sputtering. Tech. Phys. Lett. 42, 143–145 (2016). https://doi.org/10.1134/S1063785016020140
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063785016020140