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Single-crystal GaN/AlN layers on CVD diamond

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Abstract

Original approach to fabricating a GaN/AlN/nanocrystalline diamond structure has been suggested and implemented. The stages of deposition of a structure of this kind include the following: (a) growth of nanocrystalline CVD-diamond on single-crystal AlN (preliminarily grown on a silicon substrate), (b) etch removal of the silicon substrate, and (c) growth of single-crystal GaN on the surface of single-crystal AlN. Single-crystal gallium nitride with a width of the X-ray rocking curve for the (0002) reflection of 0.35° was obtained on a nanocrystalline-diamond substrate.

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References

  1. A. G. Vasil’ev, Yu. V. Kolkovskii, and Yu. A. Kontsevoi, Microwave Devices Based on Wide-Bandgap Semiconductors (Tekhnosfera, Moscow, 2011) [in Russian].

    Google Scholar 

  2. Yu. Fedorov, Elektron.: Nauka, Tekhnol. Biznes 2, 92 (2011).

    Google Scholar 

  3. Q. Diduck, J. Felbinger, L. F. Eastman, et al., Electron. Lett. 45, 14 (2009).

    Article  Google Scholar 

  4. J. Cho, Z. Li, E. Bozorg-Grayeli, et al., IEEE Trans. Compon., Packag. Manuf. Technol. 3, 79 (2013).

    Article  Google Scholar 

  5. J. G. Felbinger, M. V. S. Chandra, Y. Sun, et al., IEEE Electron Device Lett. 28, 948 (2007).

    Article  ADS  Google Scholar 

  6. G. D. Via, J. G. Felbinger, J. Blevins, et al., Phys. Status Solidi 11 (3–4), 871 (2014).

    Article  Google Scholar 

  7. D. Francis, D. Faili, D. Babic, et al., Diamond Relat. Mater. 19, 229 (2010).

    Article  MATH  ADS  Google Scholar 

  8. O. I. Khrykin, A. V. Butin, D. M. Gaponova, V. M. Danil’tsev, M. N. Drozdov, Yu. N. Drozdov, A. V. Murel, and V. I. Shashkin, Semiconductors 39, 14 (2005).

    Article  ADS  Google Scholar 

  9. A. A. Altukhov, A. L. Vikharev, A. M. Gorbachev, M. P. Dukhnovsky, V. E. Zemlyakov, K. N. Ziablyuk, A. V. Mitenkin, A. B. Muchnikov, D. B. Radishev, A. K. Ratnikova, and Yu. Yu. Fedorov, Semiconductors 45, 392 (2011).

    Article  ADS  Google Scholar 

  10. M. P. Dukhnovskii, E. N. Kulikov, A. K. Ratnikova, et al., Elektron. Tekh., Ser. 1, SVCh-Tekh. 3 (518), 40 (2013).

    Google Scholar 

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Correspondence to A. B. Muchnikov.

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Original Russian Text © O.I. Khrykin, Yu.N. Drozdov, M.N. Drozdov, P.A. Yunin, V.I. Shashkin, S.A. Bogdanov, A.B. Muchnikov, A.L. Vikharev, D.B. Radishev, 2015, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2015, Vol. 41, No. 19, pp. 73–80.

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Khrykin, O.I., Drozdov, Y.N., Drozdov, M.N. et al. Single-crystal GaN/AlN layers on CVD diamond. Tech. Phys. Lett. 41, 954–956 (2015). https://doi.org/10.1134/S1063785015100065

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  • DOI: https://doi.org/10.1134/S1063785015100065

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