Abstract
Original approach to fabricating a GaN/AlN/nanocrystalline diamond structure has been suggested and implemented. The stages of deposition of a structure of this kind include the following: (a) growth of nanocrystalline CVD-diamond on single-crystal AlN (preliminarily grown on a silicon substrate), (b) etch removal of the silicon substrate, and (c) growth of single-crystal GaN on the surface of single-crystal AlN. Single-crystal gallium nitride with a width of the X-ray rocking curve for the (0002) reflection of 0.35° was obtained on a nanocrystalline-diamond substrate.
Similar content being viewed by others
References
A. G. Vasil’ev, Yu. V. Kolkovskii, and Yu. A. Kontsevoi, Microwave Devices Based on Wide-Bandgap Semiconductors (Tekhnosfera, Moscow, 2011) [in Russian].
Yu. Fedorov, Elektron.: Nauka, Tekhnol. Biznes 2, 92 (2011).
Q. Diduck, J. Felbinger, L. F. Eastman, et al., Electron. Lett. 45, 14 (2009).
J. Cho, Z. Li, E. Bozorg-Grayeli, et al., IEEE Trans. Compon., Packag. Manuf. Technol. 3, 79 (2013).
J. G. Felbinger, M. V. S. Chandra, Y. Sun, et al., IEEE Electron Device Lett. 28, 948 (2007).
G. D. Via, J. G. Felbinger, J. Blevins, et al., Phys. Status Solidi 11 (3–4), 871 (2014).
D. Francis, D. Faili, D. Babic, et al., Diamond Relat. Mater. 19, 229 (2010).
O. I. Khrykin, A. V. Butin, D. M. Gaponova, V. M. Danil’tsev, M. N. Drozdov, Yu. N. Drozdov, A. V. Murel, and V. I. Shashkin, Semiconductors 39, 14 (2005).
A. A. Altukhov, A. L. Vikharev, A. M. Gorbachev, M. P. Dukhnovsky, V. E. Zemlyakov, K. N. Ziablyuk, A. V. Mitenkin, A. B. Muchnikov, D. B. Radishev, A. K. Ratnikova, and Yu. Yu. Fedorov, Semiconductors 45, 392 (2011).
M. P. Dukhnovskii, E. N. Kulikov, A. K. Ratnikova, et al., Elektron. Tekh., Ser. 1, SVCh-Tekh. 3 (518), 40 (2013).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © O.I. Khrykin, Yu.N. Drozdov, M.N. Drozdov, P.A. Yunin, V.I. Shashkin, S.A. Bogdanov, A.B. Muchnikov, A.L. Vikharev, D.B. Radishev, 2015, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2015, Vol. 41, No. 19, pp. 73–80.
Rights and permissions
About this article
Cite this article
Khrykin, O.I., Drozdov, Y.N., Drozdov, M.N. et al. Single-crystal GaN/AlN layers on CVD diamond. Tech. Phys. Lett. 41, 954–956 (2015). https://doi.org/10.1134/S1063785015100065
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063785015100065