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Properties of dust particles formed upon sputtering of a barium strontium titanate ceramic target in plasma of high-frequency discharge in oxygen

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Abstract

We have studied the behavior and properties of dust particles formed upon sputtering of a barium strontium titanate Ba(0.8)Sr(0.2)TiO3 ceramic target in plasma of capacitive high-frequency discharge in oxygen. The particles were accumulated in potential traps situated near the target at a remote position of the substrate. Dependences of the density of accumulated dust on the pressure, discharge power, substrate position, and substrate voltage were determined using laser-radiation scattering. The dimensions and composition of collected dust particles were determined.

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Authors and Affiliations

  1. Chechen State University, Grozny, Chechen Republic, 364037, Russia

    S. Kh. Alikhadzhiev

  2. Department of Physics, Southern Federal University, Rostov-on-Don, 344006, Russia

    N. V. Lyanguzov

  3. Southern Research Center, Russian Academy of Sciences, Rostov-on-Don, 344006, Russia

    P. S. Plyaka & G. N. Tolmachev

Authors
  1. S. Kh. Alikhadzhiev
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  2. N. V. Lyanguzov
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  3. P. S. Plyaka
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  4. G. N. Tolmachev
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Corresponding author

Correspondence to P. S. Plyaka.

Additional information

Original Russian Text © S.Kh. Alikhadzhiev, N.V. Lyanguzov, P.S. Plyaka, G.N. Tolmachev, 2014, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2014, Vol. 40, No. 18, pp. 90–96.

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Alikhadzhiev, S.K., Lyanguzov, N.V., Plyaka, P.S. et al. Properties of dust particles formed upon sputtering of a barium strontium titanate ceramic target in plasma of high-frequency discharge in oxygen. Tech. Phys. Lett. 40, 819–821 (2014). https://doi.org/10.1134/S1063785014090168

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  • DOI: https://doi.org/10.1134/S1063785014090168

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