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Formation of a diamond-like carbon film by magnetron sputtering of a graphite target under radiation flux from a black-body model

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Abstract

A method of depositing a film (under a radiation flux from a high-temperature black-body model) by magnetron sputtering of a graphite target has been implemented. The elemental composition and structure of deposited films have been analyzed by X-ray photoelectron spectroscopy and characteristic electron-energy-loss spectroscopy. The investigations have shown that chemically pure diamond-like films can be formed at a radiation-flux density no less than 1.5 × 10−4 W/m2 in the spectral range of 170–255 nm.

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Authors and Affiliations

  1. Joint Institute for High Temperatures, Russian Academy of Sciences, Moscow, 125412, Russia

    A. V. Kostanovskiy, A. A. Pronkin & I. A. Kostanovskiy

  2. National Research University “Moscow Power Engineering Institute” (MPEI), Moscow, 111250, Russia

    A. V. Kostanovskiy, A. A. Pronkin & I. A. Kostanovskiy

Authors
  1. A. V. Kostanovskiy
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  2. A. A. Pronkin
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  3. I. A. Kostanovskiy
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Corresponding author

Correspondence to A. A. Pronkin.

Additional information

Original Russian Text © A.V. Kostanovskiy, A.A. Pronkin, I.A. Kostanovskiy, 2014, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2014, Vol. 40, No. 7, pp. 35–41.

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Kostanovskiy, A.V., Pronkin, A.A. & Kostanovskiy, I.A. Formation of a diamond-like carbon film by magnetron sputtering of a graphite target under radiation flux from a black-body model. Tech. Phys. Lett. 40, 293–295 (2014). https://doi.org/10.1134/S1063785014040063

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  • DOI: https://doi.org/10.1134/S1063785014040063

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