Abstract
It was found that hidden channels with a high p-type conductivity are formed in germanium crystals under proton irradiation when using a scanning nuclear microprobe. We show that the mechanism of modification of material is analogous to that observed on surfaces as a result of mechanical cleavage of specimens. The role of acceptor centers is played by dangling bonds of the crystal lattice that are created when decelerating protons. It is established that the mobility in such channels has a value close to that in a monocrystal. The method of proton doping under discussion can be used to create highly conductive nanofragmented layers and quantum dots.
Similar content being viewed by others
References
V. V. Kozlovskii, V. A. Kozlov, and V. N. Lomasov, Semiconductors 34(2), 123 (2000).
V. N. Dobrovolskii and Yu. S. Zharkikh, Phys. Status Solidi (a) 6, 655 (1971).
Yu. S. Zharkikh and S. V. Lysochenko, JETP Lett. 31, 711 (1980).
B. M. Vul and E. I. Zavaritskaya, JETP Lett. 31, 162 (1980).
Yu. S. Zharkikh and S. V. Lysochenko, Surf. Sci. 177, 615 (1986).
S. O. Lebed, O. G. Kukharenko, M. G. Tolmachev, et al., Vopr. Atom. Nauki. Tekh.: Fiz. Rad. Povrezhd. Rad. Materialoved. 81(5), 131 (2012).
D. A. Ovchinnikov, M. Yu. Popov, and S. G. Buga, Trudy MFTI 4(3), 36 (2012).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © Yu.S. Zharkikh, S.V. Lysochenko, S.A. Lebed, O.G. Kukharenko, N.G. Tolmachev, O.V. Tretiak, 2013, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2013, Vol. 39, No. 19, pp. 19–24.
Rights and permissions
About this article
Cite this article
Zharkikh, Y.S., Lysochenko, S.V., Lebed, S.A. et al. Formation of hidden conductive channels under bombardment of germanium by high-energy protons. Tech. Phys. Lett. 39, 851–853 (2013). https://doi.org/10.1134/S106378501310012X
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S106378501310012X