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Changes in the elemental composition and microstructure of an YBa2Cu3O7 − δ target during magnetron sputtering

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Abstract

YBa2Cu3O7 − δ high-temperature superconductor targets subjected to ion-plasma sputtering in a magnetron-sputtering system are studied by X-ray diffraction analysis and secondary ion-mass spectrometry. It is found that dc magnetron sputtering is accompanied by diffusive oxygen depletion and restructuring of the target surface caused by radiation and heat effects of bombarding ions. It is assumed that these changes in the target are responsible for a decrease in the growth rate of YBa2Cu3O7 − δ films.

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Authors and Affiliations

  1. Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhni Novgorod, Russia

    D. V. Masterov, M. N. Drozdov, Yu. N. Drozdov, S. A. Pavlov, A. E. Parafin & P. A. Yunin

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  1. D. V. Masterov
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  2. M. N. Drozdov
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  3. Yu. N. Drozdov
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  4. S. A. Pavlov
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  5. A. E. Parafin
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  6. P. A. Yunin
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Corresponding author

Correspondence to D. V. Masterov.

Additional information

Original Russian Text © D.V. Masterov, M.N. Drozdov, Yu.N. Drozdov, S.A. Pavlov, A.E. Parafin, P.A. Yunin, 2013, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2013, Vol. 39, No. 19, pp. 41–50.

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Masterov, D.V., Drozdov, M.N., Drozdov, Y.N. et al. Changes in the elemental composition and microstructure of an YBa2Cu3O7 − δ target during magnetron sputtering. Tech. Phys. Lett. 39, 862–865 (2013). https://doi.org/10.1134/S1063785013100076

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  • DOI: https://doi.org/10.1134/S1063785013100076

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