Skip to main content
SpringerLink
Log in

Crystallization and thermochromism in tungsten oxide films annealed in vacuum

  • Published:
Technical Physics Letters Aims and scope Submit manuscript

Abstract

The crystalline phases formed in tungsten oxide (WO3 − x ) films upon isothermal step annealing in vacuum and air at various temperatures within 500–750°C have been studied. The films were deposited onto silica glass substrates by reactive dc magnetron sputtering. It is established that the observed thermochromism is related to the presence of an oxygen-deficient WO3 − x phase belonging to the hexagonal system, which is intensely formed as the annealing temperature increases from 650 to 750°C.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. E. A. Tutov, V. I. Kukuev, A. A. Baev, et al., Tech. Phys. 40(7), 117 (1995).

    Google Scholar 

  2. J.-L. Chiang, S.-S. Jan, J.-C. Chou, et al., Sens. Actuat. B 76, 624 (2011).

    Article  Google Scholar 

  3. Y. Shen, T. Yamazaki, Z. Liu, et al., Thin Solid Films 517, 2069 (2009).

    Article  ADS  Google Scholar 

  4. I. Riecha, M. Acosta, J. L. Peña, et al., J. Vac. Sci. Technol. A 28, 329 (2010).

    Article  Google Scholar 

  5. K. Sauvet, L. Sauques, and A. Rougier, J. Phys. Chem. Solids 71, 696 (2010).

    Article  ADS  Google Scholar 

  6. K. Sauvet, L. Sauques, and A. Rougier, Solar Energy Mater. Solar Cells 93, 2045 (2009).

    Article  Google Scholar 

  7. K. Sauvet, A. Rougier, and L. Sauques, Solar Energy Mater. Solar Cells 92, 209 (2008).

    Article  Google Scholar 

  8. H. N. Cui, M. F. Costa, V. Teixeira, et al., Surf. Sci. 532–535, 1127 (2003).

    Article  Google Scholar 

  9. M.-T. Ke, M.-T. Lee, C.-Y. Lee, et al., Sensors 9, 2895 (2009).

    Article  Google Scholar 

  10. M. Bendahan, R. Boulmani, J. L. Seguin, et al., Sens. Actuat. B 100, 320 (2004).

    Article  Google Scholar 

  11. S. K. Gullapalli, R. S. Vemuri, and C. V. Ramana, Appl. Phys. Lett. 96, 171903 (2010).

    Article  ADS  Google Scholar 

  12. S. R. Bathe, Solid State Ionics 179, 314 (2008).

    Article  Google Scholar 

  13. L. Berggren, J. C. Jonsson, and G. A. Niklasson, J. Appl. Phys. 102, 083538 (2007).

    Article  ADS  Google Scholar 

  14. A. Karuppasamy and A. Subrahmanyam, J. Appl. Phys. 101, 113522 (2007).

    Article  ADS  Google Scholar 

  15. V. A. Logacheva, A. N. Lukin, and A. M. Khoviv, Russ. J. Inorg. Chem. 52, 1201 (2007).

    Article  Google Scholar 

  16. O. V. Anisimov, V. I. Gaman, N. K. Maksimova, et al., Semiconductors 44, 366 (2010).

    Article  Google Scholar 

  17. A. A. Barybin and V. I. Shapovalov, J. Appl. Phys. 101, 054905 (2007).

    Article  ADS  Google Scholar 

  18. V. I. Kukuev, E. A. Tutov, and E. P. Domashevskaya, Sov. Phys. Tech. Phys. 32, 1176 (1987).

    Google Scholar 

  19. J. J. Kleperis, P. D. Cikmach, and A. R. Lusis, Phys. Status Solidi (a) 83, 291 (1984).

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. St. Petersburg State Electrotechnical University, St. Petersburg, 197376, Russia

    V. I. Shapovalov, A. E. Lapshin, A. E. Komlev & A. A. Komlev

  2. Grebenshchikov Institute of Silicate Chemistry, Russian Academy of Sciences, St. Petersburg, 199034, Russia

    V. I. Shapovalov, A. E. Lapshin, A. E. Komlev & A. A. Komlev

Authors
  1. V. I. Shapovalov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. E. Lapshin
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. E. Komlev
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. A. Komlev
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to V. I. Shapovalov.

Additional information

Original Russian Text © V.I. Shapovalov, A.E. Lapshin, A.E. Komlev, A.A. Komlev, 2012, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2012, Vol. 38, No. 12, pp. 8–16.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Shapovalov, V.I., Lapshin, A.E., Komlev, A.E. et al. Crystallization and thermochromism in tungsten oxide films annealed in vacuum. Tech. Phys. Lett. 38, 555–558 (2012). https://doi.org/10.1134/S1063785012060272

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063785012060272

Keywords

Search

Navigation