Skip to main content
Log in

Boron-doped transparent conducting nanodiamond films

  • Published:
Technical Physics Letters Aims and scope Submit manuscript

Abstract

Boron-doped nanodiamond (ND) films on silica substrates have been obtained by the method of microwave plasma-enhanced chemical vapor deposition (MWPECVD). Using special technological regimes ensuring the growth of boron-doped ND films after the deposition of an initial ND nucleation layer with small roughness (<15 nm) and a large number of diamond phase nucleation centers per unit surface area (>1010 cm−2), it is possible to obtain conducting ND films transparent in the UV spectral range. Dependence of the transparency and conductivity of the obtained films on the boron concentration and methane content in the working methane-hydrogen mixture has been studied.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Subscribe and save

Springer+ Basic
EUR 32.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or Ebook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. W. L. Wang, K. J. Liao, C. Z. Cai, Y. B. Zhu, Y. Ma, and H. Y. Liao, Diamond. Relat. Mater. 12, 1385 (2003).

    Article  ADS  Google Scholar 

  2. M. J. Tadjer, K. D. Hobart, J. D. Caldwell, J. E. Butler, K. X. Liu, C. R. Eddy, D. K. Gaskill, K. K. Lew, B. L. Van Mil, R. L. Myers-Ward, M. G. Ancona, F. J. Kub, and T. I. Feygelson, Appl. Phys. Lett. 91, 163 508 (2007).

    Article  Google Scholar 

  3. A. Ya. Vinogradov, V. G. Golubev, and N. A. Feoktistov, RF Patent no. 2009125117 (priority of 30.06.2009).

  4. M. V. Baidakova, A. Ya. Vul’, V. I. Siklitskii, and N. N. Faleev, Fiz. Tverd. Tela (St. Petersburg) 40, 776 (1998) [Phys. Solid. State 40, 715 (1998)].

    Google Scholar 

  5. A. E. Aleksenskii, A. Ya. Vul’, and M. A. Yagovkina, RF Patent no. 2322389 (priority of 20.04.2008).

  6. A. E. Aleksenskii, M. V. Baidakova, A. I. Veinger, A. Ya. Vul’, S. P. Vul’, and M. A. Yagovkina, RF Patent no. 2322389 (prioprity of 06.10.2008).

  7. R. Swanepoel, J. Phys. E: Sci. Instrum. 16, 1214 (1983).

    Article  ADS  Google Scholar 

  8. Z. Yin, Z. Akkerman, B. X. Yang, and F. W. Smithe, Diamond Relat. Mater. 6, 153 (1997).

    Article  ADS  Google Scholar 

  9. L. C. Chen, T. Y. Wang, J. R. Yang, K. H. Chen, D. M. Bhusari, Y. K. Chang, H. H. Hsieh, and W. F. Pong, Diamond Relat. Mater. 9, 877 (2000).

    Article  ADS  Google Scholar 

  10. L. C. Chen, P. D. Kichambare, K. H. Chen, J.-J. Wu, J. R. Yang, and S. T. Lin, J. Appl. Phys. 89, 753 (2001).

    Article  ADS  Google Scholar 

  11. M. J. Ulczynski, B. Wright, and D. K. Reinhard, Diamond Relat. Mater. 7, 1639 (1998).

    Article  ADS  Google Scholar 

  12. N. A. Feoktistov, V. G. Golubev, S. A. Grudinkin, T. S. Perova, and A. Ya. Vul’, Synthesis, Properties and Applications of Ultrananocrystalline Diamond (Springer, 2005), pp. 145–156.

  13. S. M. Leeds, T. J. Davis, P. W. May, C. D. O. Pickard, and M. N. R. Ashfold, Diamond Relat. Mater. 7, 233 (1998).

    Article  ADS  Google Scholar 

  14. D. Gruen, Ann. Rev. Sci. 29, 211 (1999).

    Article  ADS  Google Scholar 

  15. A. C. Ferrari and J. Robertson, Phys. Rev. B 63, 121 405R (2001).

    Article  Google Scholar 

  16. R. Preiffer, H. Kuzmany, N. Salk, and B. Günter, Appl. Phys. Lett. 82, 4149 (2003).

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to S. A. Grudinkin.

Additional information

Original Russian Text © N.A. Feoktistov, S.A. Grudinkin, M.V. Rybin, A.N. Smirnov, A.E. Aleksenskii, A.Ya. Vul’, V.G. Golubev, 2011, published in Pis’ma v Zhurnal Tekhnicheskoĭ Fiziki, 2011, Vol. 37, No. 7, pp. 64–71.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Feoktistov, N.A., Grudinkin, S.A., Rybin, M.V. et al. Boron-doped transparent conducting nanodiamond films. Tech. Phys. Lett. 37, 322–325 (2011). https://doi.org/10.1134/S1063785011040079

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063785011040079

Keywords

Navigation