Abstract
The formation of structure and the development of mechanical properties in films of transition metal diborides (MeB2) and boronitrides (MeBN) grown by rf magnetron sputtering have been studied. The most characteristic features are (i) the formation of a columnar structure and axial texture on (00.1) planes in MeB2 films grown by nonreactive magnetron sputtering and (ii) the formation of a composite that consists of a nanocrystalline MeB2 phase and an amorphous BN phase in films grown by the reactive sputtering in Ar + N2 gas mixtures.
Similar content being viewed by others
References
F. Kunc, J. Musil, P. H. Mayrhofer, and S. Mitterer, Surf. Coat. Tech. 174–175, 744 (2003).
R. A. Andrievskii, G. V. Kalinnikov, N. P. Kobelev, Ya.M. Soifer, and D. V. Shtanskii, Fiz. Tverd. Tela (St. Petersburg) 39, 1859 (1997) [Phys. Solid State 39, 1661 (1997)].
R. A. Andrievskii, G. V, Kalinnikov, and D. V. Shtanskii, Fiz. Tverd. Tela (St. Petersburg) 42, 741 (2000) [Phys. Solid State 42, 760 (2000)].
D. V. Shtanskii, S. A. Kulinich, E. A. Levashov, and J. J. Moore, Fiz. Tverd. Tela (St. Petersburg) 45, 1122 (2003) [Phys. Solid State 45, 1177 (2003)].
D. V. Shtanskii, F. V. Kiryukhantsev-Korneev, A. N. Sheveiko, I. A. Bashkova, O. V. Molochkin, E. A. Levashov, V. I. Kosyakin, N. B. D’yakonova, and I. V. Lyasotskii, Fiz. Tverd. Tela (St. Petersburg) 47, 242 (2005) [Phys. Solid State 47, 252 (2005)].
Shun-Tang Lin and Chiapyng Lec, Mater. Chem. Phys. 82, 691 (2003).
A. A. Goncharov, V. A. Konovalov, S. N. Dub, V. V. Petukhov, and V. A. Stupak, Fiz. Met. Metalloved. 107, 303 (2009) [Phys. Met. Metallogr. 107, 285 (2009)].
A. A. Goncharov, P. I. Ignatenko, V. A. Konovalov, et al., Fiz. Met. Metalloved. 103, 80 (2007) [Phys. Met. Metallogr. 103, 77 (2007)].
A. A. Goncharov, P. I. Ignatenko, V. V. Petukhov, et al., Zh. Tekh. Fiz. 76(10), 87 (2006) [Tech. Phys. 51, 1340 (2006)].
W. Herr and E. Broszeit, Surf. Coat. Technol. 97, 335 (1997).
A. A. Goncharov, V. A. Konovalov, and V. A. Stupak, Pis’ma Zh. Tekh. Fiz. 33(5), 12 (2007) [Tech. Phys. Lett. 33, 190 (2007)].
A. A. Goncharov, V. V. Petukhov, S. N. Dub, and V. A. Konovalov, Fiz. Met. Metalloved. 105, 391 (2008) [Phys. Met. Metallogr. 105, 362 (2008)].
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © A.A. Goncharov, A.V. Agulov, V.V. Petukhov, 2009, published in Pis’ma v Zhurnal Tekhnicheskoĭ Fiziki, 2009, Vol. 35, No. 24, pp. 35–41.
Rights and permissions
About this article
Cite this article
Goncharov, A.A., Agulov, A.V. & Petukhov, V.V. Some features of the formation of structure and properties of transition metal diboride and boronitride films. Tech. Phys. Lett. 35, 1140–1143 (2009). https://doi.org/10.1134/S1063785009120207
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063785009120207