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Numerical simulation of stationary processes in glow discharge plasma

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Abstract

The problem of determining the parameters of a low-pressure stationary glow discharge is considered in application to the simulation and optimization of the process of modification of the surface of structural materials. A coupled system of nonlinear equations is formulated, which includes the equations for charged particle fluxes (with allowance for the drift and diffusion components) and the Poisson equation for the electrostatic potential. In order to study the influence of geometric factors on the physical characteristics of discharge, the problem is considered in the spherical and planar cases. The nonlinear boundary-value problem has been solved by a modified method of continuation with respect to a parameter. The influence of diffusion processes and the gas discharge geometry region on the physical characteristics of discharge is analyzed.

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Authors and Affiliations

  1. Institute of Gas, National Academy of Sciences of Ukraine, 03113, Kiev, Ukraine

    V. A. Zhovtyansky & Yu. I. Lelyukh

Authors
  1. V. A. Zhovtyansky
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  2. Yu. I. Lelyukh
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Correspondence to V. A. Zhovtyansky.

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Original Russian Text © V.A. Zhovtyansky, Yu.I. Lelyukh, 2009, published in Pis’ma v Zhurnal Tekhnicheskoĭ Fiziki, 2009, Vol. 35, No. 15, pp. 81–90.

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Zhovtyansky, V.A., Lelyukh, Y.I. Numerical simulation of stationary processes in glow discharge plasma. Tech. Phys. Lett. 35, 725–729 (2009). https://doi.org/10.1134/S1063785009080112

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  • DOI: https://doi.org/10.1134/S1063785009080112

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