Abstract
The deposition of fluoroplastic (Teflon) films on a substrate by the method of hot wire chemical vapor deposition has been experimentally studied. It is established that the structure of obtained coatings strongly depends on nonequilibrium processes in a supersonic jet of a gaseous precursor. The dependence of the film morphology on the wire temperature is demonstrated.
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Original Russian Text © A.K. Rebrov, A.I. Safonov, N.I. Timoshenko, 2009, published in Pis’ma v Zhurnal Tekhnicheskoĭ Fiziki, 2009, Vol. 35, No. 9, pp. 11–14.
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Rebrov, A.K., Safonov, A.I. & Timoshenko, N.I. Depositing films from a supersonic jet of tetrafluoroethylene activated by interaction with a hot wire obstacle. Tech. Phys. Lett. 35, 395–396 (2009). https://doi.org/10.1134/S1063785009050022
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DOI: https://doi.org/10.1134/S1063785009050022