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Using atomic-step-structured 6H-SiC(0001) surfaces for the calibration of nanotranslations in scanning probe microscopy

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Abstract

The silicon surfaces of 6H-SiC(0001) single crystals subjected to stepwise high-temperature annealing in vacuum have been studied by atomic force microscopy and scanning tunneling microscopy techniques. A special annealing procedure is proposed that yields a structured surface featuring regular atomicsmooth steps with heights of 0.75 and 1.5 nm. We propose using these structured crystal surfaces for calibrating vertical translations in scanning probe microscopes.

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Authors and Affiliations

  1. Ioffe Physico-Technical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russia

    M. S. Dunaevskii, I. V. Makarenko, V. N. Petrov, A. A. Lebedev, S. P. Lebedev & A. N. Titkov

Authors
  1. M. S. Dunaevskii
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  2. I. V. Makarenko
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  3. V. N. Petrov
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  4. A. A. Lebedev
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  5. S. P. Lebedev
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  6. A. N. Titkov
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Corresponding author

Correspondence to A. N. Titkov.

Additional information

Original Russian Text © M.S. Dunaevskii, I.V. Makarenko, V.N. Petrov, A.A. Lebedev, S.P. Lebedev, A.N. Titkov, 2009, published in Pis’ma v Zhurnal Tekhnicheskoĭ Fiziki, 2009, Vol. 35, No. 1, pp. 98–104.

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Dunaevskii, M.S., Makarenko, I.V., Petrov, V.N. et al. Using atomic-step-structured 6H-SiC(0001) surfaces for the calibration of nanotranslations in scanning probe microscopy. Tech. Phys. Lett. 35, 47–49 (2009). https://doi.org/10.1134/S1063785009010143

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  • DOI: https://doi.org/10.1134/S1063785009010143

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