Characteristics and plasma parameters of a short-wavelength low-pressure discharge lamp

Abstract

We have studied the working optical characteristics and electron kinetic coefficients of a short-wavelength, electric discharge exciplex-halogen UV-VUV lamp employing a mixture of argon and chlorine with a total pressure of P = 0.5–10 kPa. The lamp operates on a system of broadened electron-vibrational bands of ArCl (175 nm) and chlorine (200, 258 nm) molecules, which overlap to form a continuum in the spectral range of 160–260 nm. It is established that the optimum mixtures are those with p(Ar) − p(Cl₂) = (2–4)−(0.15–0.30) kPa. The average output power of the short-wavelength radiation is 1–2 W at an efficiency of ∼5%. The electron energy distribution functions (EDFs) and the discharge plasma parameters have been calculated by solving the Boltzmann equation for a gas mixture with the experimentally determined optimum composition in the range of E/P values from 1 to 200 V/(cm Torr), where E is the electric field strength and P is the total gas pressure. Using the obtained EDFs, the electron transport characteristics, specific discharge power losses for the main elementary processes, and rate constants of electron processes are determined.