Abstract
A method based on an analysis of the spatial distribution of elastically reflected electrons is proposed for the depth-resolved, quantitative nondestructive determination of the elemental composition of solid surfaces at thicknesses in a nanometer range.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
I. M. Bronshtein, V. P. Pronin, V. P., Khinich, and I. A. Chistotin, Izv. Ross. Gos. Pedagog. Univ. im. A.I. Gertsena, Ser. Fiz., No. 16 (15), 151 (2006).
A. Jablonski, Progr. Surf. Sci. 74, 357 (2003).
V. V. Makarov and S. I. Igonin, Pis’ma Zh. Tekh. Fiz. 13, 1043 (1987) [Tech. Phys. Lett. 13, 435 (1987)].
G. T. Orosz, G. Gergely, M. Menyhard, et al., Surf. Sci. 566–568, 544 (2004).
P. C. Powell and A. Jablonski, Standard Reference Data Program Database 64 (National Institute of Standards and Technology, Gaithersburg, 2003).
A. M. Gurvich, Introduction to the Physical Chemistry. of Crystal Phosphors (Vysshaya Shkola, Moscow, 1982).
Author information
Authors and Affiliations
Additional information
Original Russian Text © V.P. Pronin, I.I. Khinich, I.A. Chistotin, 2008, published in Pis’ma v Zhurnal Tekhnicheskoĭ Fiziki, 2008, Vol. 34, No. 19, pp. 21–26.
Rights and permissions
About this article
Cite this article
Pronin, V.P., Khinich, I.I. & Chistotin, I.A. Elastic peak electron spectroscopy for quantitative elemental analysis of solids. Tech. Phys. Lett. 34, 825–827 (2008). https://doi.org/10.1134/S1063785008100040
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063785008100040