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Effect of deposition temperature on the structure and electrical properties of thin barium strontium titanate films

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Abstract

We have studied the properties of thin ferroelectric films of barium strontium titanate (Ba,Sr)TiO3 (BSTO) obtained by RF ion-plasma deposition at various substrate temperatures in the 700–900°C range. It is established that BSTO films deposited at 700–800°C exhibit a polycrystalline structure. Beginning with 800°C, the film structure changes so that an (111)-oriented phase appears and becomes predominating. The effect of the deposition temperature on the grain size and the relationship between the structural features and electrical properties of the films are considered.

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Authors and Affiliations

  1. St. Petersburg State Electrotechnical University, St. Petersburg, 197376, Russia

    A. V. Tumarkin, A. K. Mikhailov & A. G. Altynnikov

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  1. A. V. Tumarkin
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  2. A. K. Mikhailov
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  3. A. G. Altynnikov
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Correspondence to A. V. Tumarkin.

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Original Russian Text © A.V. Tumarkin, A.K. Mikhailov, A.G. Altynnikov, 2008, published in Pis’ma v Zhurnal Tekhnicheskoĭ Fiziki, 2008, Vol. 34, No. 18, pp. 14–19.

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Tumarkin, A.V., Mikhailov, A.K. & Altynnikov, A.G. Effect of deposition temperature on the structure and electrical properties of thin barium strontium titanate films. Tech. Phys. Lett. 34, 776–778 (2008). https://doi.org/10.1134/S1063785008090186

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  • DOI: https://doi.org/10.1134/S1063785008090186

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