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Cluster diagnostics in Si1−x Ge x solid solutions using low-energy ion backscattering spectroscopy

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Abstract

The fraction of germanium clusters in solid solutions of the Si1−x Ge x system with a small germanium content (x ∼ 5%) was determined using a method based on the energy analysis of argon ions scattered, upon single and double collisions in the sample, at an angle of θ = 129° relative to the primary beam of ions with an energy of several kiloelectronvolts. Using the proposed low-energy ion backscattering spectroscopy (LEIBS) technique, it was found that the fraction of germanium clusters in the samples studied was ≤20%. The LEIBS method provides a several-fold decrease in the detection threshold for a cluster component in the semiconductor compound as compared to the traditional method based on the measurements of ion scattering at small angles.

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References

  1. A. P. Shergin, P. Yu. Babenko, and V. M. Mikouskin, Izv. Ross. Akad. Nauk, Ser. Fiz. 68, 380 (2004).

    Google Scholar 

  2. A. P. Shergin and A. V. Shaikin, Izv. Ross. Akad. Nauk, Ser. Fiz. 66, 467 (2002).

    Google Scholar 

  3. E. S. Mashkova and V. A. Molchanov, Medium-Energy Ion Scattering by Solid Surfaces (Atomizdat, Moscow, 1980) [in Russian].

    Google Scholar 

  4. P. Yu. Babenko and A. P. Shergin, Pis’ma Zh. Éksp. Teor. Fiz. 84, 451 2006) [JETP Lett. 84, 377 (2006)].

    Google Scholar 

  5. I. F. Urazgildin, Izv. Ross. Akad. Nauk, Ser. Fiz. 60(7), 44 (1996).

    Google Scholar 

  6. M. L. Yu and N. D. Lang, Nucl. Instrum. Methods Phys. Res. B 14, 403 (1986).

    Article  ADS  Google Scholar 

  7. Sputtering by Particle Bombardment II, Ed. by R. Behrisch (Springer, Berlin, 1983), Vol. 2.

    Google Scholar 

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Authors and Affiliations

  1. Ioffe Physicotechnical Institute, Russian Academy of Sciences, St. Petersburg, 194021, Russia

    P. Yu. Babenko & A. P. Shergin

Authors
  1. P. Yu. Babenko
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  2. A. P. Shergin
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Original Russian Text © P.Yu. Babenko, A.P. Shergin, 2007, published in Pis’ma v Zhurnal Tekhnicheskoĭ Fiziki, 2007, Vol. 33, No. 9, pp. 37–43.

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Babenko, P.Y., Shergin, A.P. Cluster diagnostics in Si1−x Ge x solid solutions using low-energy ion backscattering spectroscopy. Tech. Phys. Lett. 33, 377–379 (2007). https://doi.org/10.1134/S1063785007050057

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  • DOI: https://doi.org/10.1134/S1063785007050057

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