Abstract
Continuous variation of the properties of capacitively coupled RF discharge sheaths on the passage from higher to lower discharge frequencies is demonstrated. A new discharge regime, called dynamic, is revealed in which the Bohm velocity represents a characteristic scale of ion velocities in the discharge over a considerable part of the RF oscillation period. Accordingly, three types of regimes of a discharge sheath can be distinguished, including high-frequency (in which the motion of ions is determined by the average field), quasistationary, and dynamic. It is shown that the properties of discharge sheaths are determined by two dimensionless parameters, and the domains of these parameters corresponding to various regimes are indicated. The results of numerical particle-in-cell model calculations are presented and interpreted.
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Original Russian Text © D.S. Nikandrov, L.D. Tsendin, 2006, published in Pis’ma v Zhurnal Tekhnicheskoĭ Fiziki, 2006, Vol. 32, No. 16, pp. 62–74.
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Nikandrov, D.S., Tsendin, L.D. Collisionless sheaths of capacitively coupled RF discharge at various frequencies. Tech. Phys. Lett. 32, 719–724 (2006). https://doi.org/10.1134/S1063785006080244
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DOI: https://doi.org/10.1134/S1063785006080244