Abstract
A highly stable sparkless discharge can be obtained using preionization by an electron beam, photons, and plasma electrons formed in a barrier open discharge, for which a grid electrode (that also serves as a cathode for the main discharge) is situated immediately on a dielectric-coated electrode surface. In the standard gas mixture for an ArF laser at a pressure of 2.5 bar, an energy deposition of 2.5 J/cm3 in a 12-ns pulse at a specific power of 210 MW/cm3 was achieved. The results are of interest for the development of technological excimer lasers operating at a high pulse repetition rate.
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Original Russian Text © A.R. Sorokin, 2006, published in Pis’ma v Zhurnal Tekhnicheskoĭ Fiziki, 2006, Vol. 32, No. 10, pp. 7–13.
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Sorokin, A.R. Sparkless discharge in dense gases with preionization by a low-energy electron beam of a barrier open discharge. Tech. Phys. Lett. 32, 417–420 (2006). https://doi.org/10.1134/S1063785006050154
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DOI: https://doi.org/10.1134/S1063785006050154