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Profile Analysis of Ferrite–Garnet Films by Glow-Discharge Optical Emission Spectroscopy

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Abstract

The results of experiments on the application of the method of glow discharge optical emission spectroscopy for the profile analysis of vacuum-deposited single- and double-layer films of multicomponent ferrite–garnets of various compositions before and after crystallization annealing have been presented. The presence of internal and external transition layers has been revealed and the modification of their elemental composition during crystallization and at different synthesis sequences of individual components in ferrite–garnet heterostructures have been studied.

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Funding

This research was supported by a grant from the Russian Science Foundation, project no. 19-72-20154.

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Authors and Affiliations

  1. Vernadsky Crimean Federal University, 295007, Simferopol, Russia

    A. A. Fedorenko, V. N. Berzhansky, A. V. Karavainikov, A. N. Shaposhnikov & A. R. Prokopov

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  1. A. A. Fedorenko
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  2. V. N. Berzhansky
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  3. A. V. Karavainikov
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  4. A. N. Shaposhnikov
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  5. A. R. Prokopov
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Correspondence to A. N. Shaposhnikov.

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Translated by N. Petrov

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Fedorenko, A.A., Berzhansky, V.N., Karavainikov, A.V. et al. Profile Analysis of Ferrite–Garnet Films by Glow-Discharge Optical Emission Spectroscopy. Tech. Phys. 66, 343–348 (2021). https://doi.org/10.1134/S1063784221020110

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  • DOI: https://doi.org/10.1134/S1063784221020110

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