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Self-Organization of Dimensional and Concentration Diversity in a CNx : EuyOz Film Clusterized Structure

  • ELECTROPHYSICS, ELECTRON AND ION BEAMS, PHYSICS OF ACCELERATORS
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Abstract

The structure of diamond-like CNx : EuyOz films obtained by magnetron sputtering of a composite carbon–metal–oxide target in a nitrogen atmosphere has been examined. It has been shown that the components of the target and working atmosphere self-organize, with europia and carbon oxide entering into an intense solid-state substitution reaction to form CNx : EuyOz complexes. These complexes show up in fine clusters of a growing film. It was found that samples grown at an intermediate working gas pressure have a unique uniformly variable structure filled with different clusters.

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Funding

This study was done in the framework of the research program adopted in the Galkin Institute for Physics and Engineering.

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Authors and Affiliations

  1. Galkin Institute for Physics and Engineering, 83114, Donetsk, Ukraine

    Z. A. Samoilenko, N. N. Ivakhnenko, E. I. Pushenko, E. I. Shemchenko & V. N. Varyukhin

  2. Tugan-Baranovsky National University of Economics and Trade, 83050, Donetsk, Ukraine

    N. N. Ivakhnenko

Authors
  1. Z. A. Samoilenko
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  2. N. N. Ivakhnenko
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  3. E. I. Pushenko
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  4. E. I. Shemchenko
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  5. V. N. Varyukhin
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Correspondence to Z. A. Samoilenko.

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Translated by V. Isaakyan

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Samoilenko, Z.A., Ivakhnenko, N.N., Pushenko, E.I. et al. Self-Organization of Dimensional and Concentration Diversity in a CNx : EuyOz Film Clusterized Structure. Tech. Phys. 65, 305–311 (2020). https://doi.org/10.1134/S106378422002022X

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  • DOI: https://doi.org/10.1134/S106378422002022X

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