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Multilayer Ag/Y Mirrors for the Spectral Range of 9–11 nm

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Abstract

Multilayer Ag/Y mirrors intended for the spectral range of 9–11 nm have been investigated. The parameters of mirrors, specifically, the thicknesses of transition layers, have been determined. The efficiency of B4C and Si barrier layers has been demonstrated. It has been shown that the properties of structures like Ag/Y and Ag/Y with B4C and Si barriers layers have poor temporal stability. The highest reflection coefficient of 18% at a wavelength of 9.34 nm, has been observed for the Ag/Si/Y structure. The same structure has the best temporal stability.

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REFERENCES

  1. D. Martinez-Galarce, R. Soufli, D. L. Windt, M. Bruner, et al., Opt. Eng. 59, 095102 (2013).

    Article  ADS  Google Scholar 

  2. N. I. Chkhalo, S. A. Garakhin, A. Ya. Lopatin, A.  N.  Nechay, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, N. N. Tsybin, and S. Yu. Zuev, AIP Adv. 8, 105003 (2018).

    Article  ADS  Google Scholar 

  3. E. A. Vishnyakov, F. F. Kamenets, V. V. Kondratenko, M. S. Luginin, A. V. Panchenko, Yu. P. Pershin, A. S. Pirozhkov, and E. N. Ragozin, Quantum Electron. 42, 143 (2012).

    Article  ADS  Google Scholar 

  4. Z. Wang, H. Wang, J. Zhu, et al., Appl. Phys. Lett. 89, 241120 (2006).

    Article  ADS  Google Scholar 

  5. P. Gupta, T. P. Tenka, S. Rai, et al., J. Phys. D 40, 6684 (2007).

    Article  ADS  Google Scholar 

  6. D. S. Kvashennikov, Yu. A. Vainer, S. Yu. Zuev, and V. N. Polkovnikov, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 13, 177 (2019).

    Article  Google Scholar 

  7. D. L. Windt and E. M. Gullikson, Appl. Opt. 54, 5850 (2015).

    Article  ADS  Google Scholar 

  8. D. Xu, Q. Huang, Y. Wang, et al., Opt. Express 23, 33018 (2015).

    Article  ADS  Google Scholar 

  9. C. Montcalm, P. A. Kearney, J. M. Slaughter, B. T. Sullivan, M. Chaker, H. Pepin, and C. M. Falco, Appl. Opt. 35, 5134 (1996).

    Article  ADS  Google Scholar 

  10. I. G. Zabrodin, B. A. Zakalov, I. A. Kas’kov, E. B. Klyuenkov, V. N. Polkovnikov, N. N. Salashchenko, S. D. Starikov, and L. A. Suslov, J. Surf. Invest.: X-Ray, Synchrotron Neutron Tech. 7, 637 (2013).

    Article  Google Scholar 

  11. S. S. Andreev, A. D. Akhsakhalyan, M. A. Bibishkin, et al., Cent. Eur. J. Phys. 1, 191 (2003).

    Google Scholar 

  12. M. Svechnikov, D. Pariev, A. Nechay, et al., J. Appl. Crystallogr. 50, 1428 (2017).

    Article  Google Scholar 

  13. S. Yu. Zuev, S. V. Kuzin, V. N. Polkovnikov, and N. N. Salashchenko, Bull. Russ. Acad. Sci.: Phys. 74, 50 (2010).

    Article  Google Scholar 

  14. N. I. Chkhalo, D. E. Pariev, V. N. Polkovnikov, N. N. Salashchenko, R. A. Shaposhnikov, I. L. Stroulea, M. V. Svechnikov, Yu. A. Vainer, and S. Yu. Zuev, Thin Solid Films 631, 106 (2017).

    Article  ADS  Google Scholar 

  15. M. V. Svechnikov, N. I. Chkhalo, S. A. Gusev, A. N. Nechay, D. E. Pariev, A. E. Pestov, V. N. Polkovnikov, D. A. Tatarskiy, N. N. Salashchenko, F. Schäfers, M. G. Sertsu, A. Sokolov, Yu. A. Vainer, and M. V. Zorina, Opt. Express 26, 33718 (2018).

    Article  ADS  Google Scholar 

  16. Q. Zhong, Z. Zhang, R. Qi, J. Li, Z. Wang, K. L. Guen, J.-M. Andre, and P. Jonnard, Opt. Express 21, 14399 (2018).

    Article  ADS  Google Scholar 

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Funding

This study was performed in accordance with State Task no. 0035-2014-0204 for the Institute of Physics of Microstructures. It was partially supported by the Russian Foundation for Basic Research (grant nos. 19-02-00081 and 17-52-150006) and a joint Russian–French CNRC/RFBR grant (PRC 2016, no. 1567).

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Authors and Affiliations

  1. Institute for Physics of Microstructures, Russian Academy of Sciences, 607680, Nizhny Novgorod, Russia

    D. S. Kvashennikov, S. Yu. Zuev, V. N. Polkovnikov, N. N. Salashchenko & N. I. Chkhalo

  2. Lobachevsky State University, 603950, Nizhny Novgorod, Russia

    D. S. Kvashennikov

  3. Laboratoire Charles Fabry, Institut d’Optique Graduate School, 91127, Palatseau, France

    F. Delmotte & E. Meltchakov

Authors
  1. D. S. Kvashennikov
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  2. S. Yu. Zuev
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  3. V. N. Polkovnikov
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  4. N. N. Salashchenko
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  5. N. I. Chkhalo
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  6. F. Delmotte
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  7. E. Meltchakov
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Corresponding author

Correspondence to V. N. Polkovnikov.

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Translated by V. Isaakyan

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Kvashennikov, D.S., Zuev, S.Y., Polkovnikov, V.N. et al. Multilayer Ag/Y Mirrors for the Spectral Range of 9–11 nm. Tech. Phys. 64, 1684–1687 (2019). https://doi.org/10.1134/S1063784219110161

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  • DOI: https://doi.org/10.1134/S1063784219110161

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