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Calculation of Self-Sputtering Yield under Ion Bombardment of Solids: Computer Simulation and Theory

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Abstract

We developed a computer simulation program for investigation of solid self-sputtering under ion bombardment. The program is based on binary collision approximation, truncated Coulomb potential, and the model of local inelastic losses proportional to energy. As a result of simulation, the self-sputtering yield is calculated as a function of atomic number and ion energy. To verify the cascade simulation code, we created a self-sputtering theory for the case of hard sphere potential. Simulation results show good agreement with both experimental data and theory.

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Authors and Affiliations

  1. Russian New University, 105505, Moscow, Russia

    A. I. Tolmachev

  2. Universita della Calabria, 87036, Cozenza, Italy

    L. Forlano

Authors
  1. A. I. Tolmachev
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  2. L. Forlano
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Corresponding authors

Correspondence to A. I. Tolmachev or L. Forlano.

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1The article was translated by the authors.

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Tolmachev, A.I., Forlano, L. Calculation of Self-Sputtering Yield under Ion Bombardment of Solids: Computer Simulation and Theory. Tech. Phys. 63, 1455–1458 (2018). https://doi.org/10.1134/S1063784218100225

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  • DOI: https://doi.org/10.1134/S1063784218100225

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