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Microturbines Formed with the Aid of Direct Laser Recording on Photoresist

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Abstract

A method for fabrication of mechanical elements (microturbines) that receive torque from vortex optical beams is proposed. Experimental results on fabrication of multiple microturbines are presented. Shapes of the microturbines are measured using an optical microscope, ZYGO white-light interferometer, and electron microscope.

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Authors and Affiliations

  1. Institute of Image Processing Systems, Russian Academy of Sciences, Samara, 443001, Russia

    R. V. Skidanov, O. Yu. Moiseev & S. V. Ganchevskaya

  2. Korolev State Aerospace University, Samara, 443086, Russia

    R. V. Skidanov, O. Yu. Moiseev & S. V. Ganchevskaya

Authors
  1. R. V. Skidanov
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  2. O. Yu. Moiseev
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  3. S. V. Ganchevskaya
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Correspondence to S. V. Ganchevskaya.

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Original Russian Text © R.V. Skidanov, O.Yu. Moiseev, S.V. Ganchevskaya, 2018, published in Zhurnal Tekhnicheskoi Fiziki, 2018, Vol. 88, No. 6, pp. 888–891.

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Skidanov, R.V., Moiseev, O.Y. & Ganchevskaya, S.V. Microturbines Formed with the Aid of Direct Laser Recording on Photoresist. Tech. Phys. 63, 862–865 (2018). https://doi.org/10.1134/S1063784218060208

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  • DOI: https://doi.org/10.1134/S1063784218060208

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