Skip to main content
SpringerLink
Log in

Planarization of a surface of nanoporous silica–titania composition by atomic-molecular chemical assembly

  • Physical Science of Materials
  • Published:
Technical Physics Aims and scope Submit manuscript

Abstract

The processes involved in the planarization of the surface of nanoporous SiO2 by the atomicmolecular deposition of nanoscale TiO2 films were studied in regimes with different degrees of penetration of TiO2 into SiO2 nanopores. The technological process parameters that correspond to different regimes of surface planarization were examined. The degree of penetration of TiO2 into SiO2 nanopores was monitored using reflection ellipsometry by measuring the depth distribution of the refraction index within the two-layer model.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. R. S. Brusa, C. Macchi, S. Mariazzi, and G. P. Karwasz, Acta Phys. Pol., A 107, 702 (2005).

    Article  ADS  Google Scholar 

  2. M. A. Worsleya, M. Roberts, S. F. Bent, S. M. Gates, T. Shaw, W. Volksen, and R. Miller, Microelectron. Eng. 82 (2), 113 (2005).

    Article  Google Scholar 

  3. A. I. Maksimov, V. A. Moshnikov, Yu. M. Tairov, and O. A. Shilova, Basics of Sol–Gel Technology of Nanocomposites (Elmor, St. Petersburg, 2007).

    Google Scholar 

  4. V. I. Gavrilenko, A. M. Grekhov, D. V. Korbutyak, and V. G. Litovchenko, A Handbook of Optical Properties of Semiconductors (Naukova Dumka, Kiev, 1987).

    Google Scholar 

  5. A. A. Kurashov, Molodoi Uchenyi 1 (6), 63 (2013).

    Google Scholar 

  6. V. E. Drozd, A. A. Romanov, V. A. Volodazhskii, M. A. Kuznetsova, and E. N. Sevost’yanov, Biotekhnosfera, No. 1/2 (13/14), 26 (2011).

    Google Scholar 

  7. S. I. Goloudina, A. S. Ivanov, M. B. Krishtab, V. V. Luchinin, V. M. Pasyuta, I. V. Gofman, V. P. Sklizkova, V. V. Kudryavtsev, and R. M. Baklanov, Mater. Res. Soc. Symp. Proc. 1428 (2012).

    Google Scholar 

  8. V. V. Luchinin and M. F. Panov, Mikroelektronika 31 (2), 129 (2002).

    Google Scholar 

  9. R. M. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977, Mir, Moscow, 1981).

    Google Scholar 

  10. D. Ts. Dimitrov, V. V. Luchinin, V. A. Moshnikov, and M. F. Panov, Tech. Phys. 44, 468 (1999).

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. St. Petersburg Electrotechnical University LETI, St. Petersburg, 197376, Russia

    V. V. Luchinin, M. F. Panov & A. A. Romanov

Authors
  1. V. V. Luchinin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. F. Panov
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. A. Romanov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to M. F. Panov.

Additional information

Original Russian Text © V.V. Luchinin, M.F. Panov, A.A. Romanov, 2017, published in Zhurnal Tekhnicheskoi Fiziki, 2017, Vol. 87, No. 5, pp. 736–740.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Luchinin, V.V., Panov, M.F. & Romanov, A.A. Planarization of a surface of nanoporous silica–titania composition by atomic-molecular chemical assembly. Tech. Phys. 62, 755–759 (2017). https://doi.org/10.1134/S1063784217050164

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063784217050164

Search

Navigation