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Physical properties of carbon films obtained by methane pyrolysis in an electric field

  • Physics of Nanostructures
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Abstract

A method of synthesizing carbon films on single-crystal silicon substrates by methane pyrolysis in an electrical field is suggested. The pressure and temperature arising in a working chamber when the substrate is exposed to C–4 ions during pyrolysis are measured. Ion bombardment generates nuclei in the form of fibers about 2 μm in diameter providing the growth of a polycrystalline film. The resulting material is examined using electron microscopy and photo- and cathodoluminescence. Synthesized films are a composite material the matrix of which contains nanoclusters of a dissimilar crystalline nature. The effect of considerable two-stage decrease in the resistivity of the film material with increasing temperature from 300 to 1750 K is discovered. This points to the semiconducting properties of thick carbon films.

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Authors and Affiliations

  1. Institute of Solid-State Physics, Russian Academy of Sciences, ul. Akademika Osip’yana 2, Chernogolovka, Moscow oblast, 142432, Russia

    S. K. Brantov, A. N. Tereshchenko & E. A. Shteinman

  2. Institute of Problems of Microelectronics and Ultrapure Materials, Russian Academy of Sciences, ul. Akademika Osip’yana 5, Chernogolovka, Moscow oblast, 142432, Russia

    E. B. Yakimov

Authors
  1. S. K. Brantov
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  2. A. N. Tereshchenko
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  3. E. A. Shteinman
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  4. E. B. Yakimov
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Correspondence to S. K. Brantov.

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Original Russian Text © S.K. Brantov, A.N. Tereshchenko, E.A. Shteinman, E.B. Yakimov, 2016, published in Zhurnal Tekhnicheskoi Fiziki, 2016, Vol. 86, No. 3, pp. 110–113.

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Brantov, S.K., Tereshchenko, A.N., Shteinman, E.A. et al. Physical properties of carbon films obtained by methane pyrolysis in an electric field. Tech. Phys. 61, 428–431 (2016). https://doi.org/10.1134/S1063784216030051

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  • DOI: https://doi.org/10.1134/S1063784216030051

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