Abstract
The rf capacitive gas discharge with an interelectrode distance of 15–200 µm is studied, and possible forms of its existence are established. The conditions for the formation of discrete microdischarges with a preset geometry, which are localized near some elements of the surfaces of the electrodes, are formulated.
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Original Russian Text © A.V. Abramov, E.A. Pankratova, I.S. Surovtsev, D.Yu. Zolototrubov, 2016, published in Zhurnal Tekhnicheskoi Fiziki, 2016, Vol. 61, No. 1, pp. 50–54.
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Abramov, A.V., Pankratova, E.A., Surovtsev, I.S. et al. Characteristics of a localized gas discharge. Tech. Phys. 61, 47–52 (2016). https://doi.org/10.1134/S1063784216010023
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DOI: https://doi.org/10.1134/S1063784216010023