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Determination of thickness of ultrathin surface films in nanostructures from the energy spectra of reflected electrons

  • Physics of Nanostructures
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Abstract

A new method for determining the thickness of opaque films on bulk substrates is considered in the nanometer size range. The method is based on analysis and measurements of the energy spectra of back-scattered electrons. The thicknesses of local film nanostructures are determined from the amplitude values of the spectra and from their shift on the energy axis.

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Authors and Affiliations

  1. Moscow State University, Moscow, 119991, Russia

    S. Yu. Kupreenko & E. I. Rau

  2. Physicotechnological Institute, Russian Academy of Sciences, Nakhimovskii pr. 36/1, Moscow, 117218, Russia

    N. A. Orlikovskii & A. A. Tatarintsev

  3. Institute of Nanotechnologies in Microelectronics, Russian Academy of Sciences, Nagatinskaya ul. 18, Moscow, 115487, Russia

    A. M. Tagachenkov

Authors
  1. S. Yu. Kupreenko
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  2. N. A. Orlikovskii
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  3. E. I. Rau
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  4. A. M. Tagachenkov
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  5. A. A. Tatarintsev
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Corresponding author

Correspondence to E. I. Rau.

Additional information

Original Russian Text © S.Yu. Kupreenko, N.A. Orlikovskii, E.I. Rau, A.M. Tagachenkov, A.A. Tatarintsev, 2015, published in Zhurnal Tekhnicheskoi Fiziki, 2015, Vol. 85, No. 10, pp. 101–104.

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Kupreenko, S.Y., Orlikovskii, N.A., Rau, E.I. et al. Determination of thickness of ultrathin surface films in nanostructures from the energy spectra of reflected electrons. Tech. Phys. 60, 1515–1518 (2015). https://doi.org/10.1134/S1063784215100205

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  • DOI: https://doi.org/10.1134/S1063784215100205

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