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Violation of the boltzmann distribution for plasma electron number density in two-chamber inductively coupled plasma discharges

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Abstract

It is found for inductively coupled plasma (ICP) discharges in two-chamber structures in which a strong electron temperature gradient can be produced, the classical Boltzmann distribution for the electron number density does not exist even at qualitative level; a more general (extended Boltzmann) distribution for the electron energy density holds with a satisfactory accuracy.

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References

  1. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Material Processing (Wiley, New York, 2005).

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Authors and Affiliations

  1. St. Petersburg State University, Universitetskii pr. 26, St. Petersburg, 198504, Russia

    E. A. Bogdanov, A. A. Kudryavtsev & Z. S. Ochikova

  2. St. Petersburg National Research University of Information Technologies, Mechanics, and Optics (ITMO), Kronverkskii pr. 49, St. Petersburg, 197101, Russia

    A. S. Chirtsov

Authors
  1. E. A. Bogdanov
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  2. A. A. Kudryavtsev
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  3. Z. S. Ochikova
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  4. A. S. Chirtsov
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Corresponding author

Correspondence to A. A. Kudryavtsev.

Additional information

Original Russian Text © E.A. Bogdanov, A.A. Kudryavtsev, Z.S. Ochikova, A.S. Chirtsov, 2015, published in Zhurnal Tekhnicheskoi Fiziki, 2015, Vol. 85, No. 10, pp. 155–158.

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Bogdanov, E.A., Kudryavtsev, A.A., Ochikova, Z.S. et al. Violation of the boltzmann distribution for plasma electron number density in two-chamber inductively coupled plasma discharges. Tech. Phys. 60, 1570–1573 (2015). https://doi.org/10.1134/S1063784215100084

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  • DOI: https://doi.org/10.1134/S1063784215100084

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