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Waveguide spectroscopy of bilayer structures

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Abstract

A least-squares procedure is proposed for the reconstruction of optical parameters of bilayer structures. The objective function is constructed using experimental and calculated data on the reflectance of a coupling prism. A structure consisting of two different silicon oxynitride films on a silicon substrate is studied. The effect of scattering on the solution of the inverse problem is analyzed.

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Authors and Affiliations

  1. Kuleshov State University, ul. Kosmonavtov 1, Mogilev, 212022, Belarus

    A. B. Sotsky, S. O. Parashkov & I. S. Dzen

  2. Metricon Corporation, Pennington, New Jersey, 08534, USA

    L. M. Steingart & J. H. Jackson

  3. Belarusian—Russian University, pr. Mira 43, Mogilev, 212005, Belarus

    L. I. Sotskaya

Authors
  1. A. B. Sotsky
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  2. L. M. Steingart
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  3. J. H. Jackson
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  4. S. O. Parashkov
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  5. I. S. Dzen
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  6. L. I. Sotskaya
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Corresponding author

Correspondence to A. B. Sotsky.

Additional information

Original Russian Text © A.B. Sotsky, L.M. Steingart, J.H. Jackson, S.O. Parashkov, I.S. Dzen, L.I. Sotskaya, 2015, published in Zhurnal Tekhnicheskoi Fiziki, 2015, Vol. 85, No. 8, pp. 116–123.

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Sotsky, A.B., Steingart, L.M., Jackson, J.H. et al. Waveguide spectroscopy of bilayer structures. Tech. Phys. 60, 1220–1226 (2015). https://doi.org/10.1134/S1063784215080253

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  • DOI: https://doi.org/10.1134/S1063784215080253

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