Abstract
X-ray topography and high-resolution diffractometry methods are used for testing GaAs wafers from different manufacturers, which are used as substrates for epitaxial growth in construction of power semiconductor devices. Typical features of such wafers are a distorted surface layer, bent, and growth dislocations with two types of distribution with a density of (1–2) × 104 cm−2. The best and worse substrates are determined from the finishing of the working surface, and the optimal combination of X-ray methods for estimating the quality of finishing of the working surface of the crystals with a high level of X-ray absorption is established.
References
J. Kovalsky, T. Basler, R. Bhojany, J. Lutz, V. Dudec, D. Opalnikov, and V. Voitovich, in Proceedings of the PCIM Europe, Nuremberg-Berlin, 2013 (VDE Verlag, Berlin, 2013), pp. 975–981.
V. A. Kozlov, F. Yu. Soldatenkov, I. L. Shulpina, V. G. Danilchenko, and V. I. Korolkov, “Defect engineering for carrier lifetime control in high voltage GaAs power diodes,” Proceedings of the 25th SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014), Saratoga Springs, New York, 2014.
V. M. Andreev, L. M. Dolginov, and D. N. Tret’yakov, Liquid Epitaxy in Semiconductor Devices, Ed. by Zh. I. Alferov (Sovetskoe Radio, Moscow, 1975).
H. Kressel and H. Nelson, “Properties and applications of III–V compound films deposited by liquid phase epitaxy,” Physics of Thin Films: Advances in Research and Development, Ed. by G. Haas, M. H. Francombe, and R. W. Hoffman (Academic, New York, 1974), Vol. 7.
F. Yu. Soldatenkov, V. G. Danil’chenko, and V. I. Korol’kov, Semiconductors 41, 211 (2007).
D. K. Bowen and B. K. Tanner, High Resolution X-Ray Diffractometry and Topography (CRC, Boca Raton, 2005).
I. L. Shul’pina and V. A. Kozlov, Izv. Vyssh. Uchebn. Zaved., Mater. Elektron. Tekh., No. 1, 28 (2013).
I. L. Shul’pina, Kristallografiya 39, 270 (1994).
I. L. Shul’pina and T. S. Argunova, J. Phys. D: Appl. Phys. 28, A47 (1995).
S. O’Hara, M. A. G. Halliwell, and J. B. Childs, J. Appl. Crystallogr. 5, 401 (1972).
V. V. Ratnikov, R. N. Kyutt, T. V. Shubina, T. Paskova, and B. Monemar, J. Phys. D: Appl. Phys. 34, A30 (2001).
G. A. Rozgonyi and T. J. Ciesielka, Rev. Sci. Instrum. 44, 1053 (1973).
A. Jida and K. Kohra, Jpn. J. Appl. Phys. 17, 963 (1978).
R. N. Kyutt, Zh. Tekh. Fiz. 57, 178 (1987).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © I.L. Shul’pina, V.V. Ratnikov, V.A. Kozlov, F.Yu. Soldatenkov, V.E. Voitovich, 2014, published in Zhurnal Tekhnicheskoi Fiziki, 2014, Vol. 84, No. 10, pp. 149–152.
Rights and permissions
About this article
Cite this article
Shul’pina, I.L., Ratnikov, V.V., Kozlov, V.A. et al. Estimation of quality of GaAs substrates used for constructing semiconductor power devices. Tech. Phys. 59, 1566–1569 (2014). https://doi.org/10.1134/S1063784214100296
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063784214100296