Skip to main content
SpringerLink
Log in

Field-emission diodes based on semiconductor—polycrystalline diamond heterojunctions

  • Physical Electronics
  • Published:
Technical Physics Aims and scope Submit manuscript

Abstract

A complex of electrophysical and technological studies of solid-state field-emission diodes is carried out. Emission comes from an array of nanometer objects near the semiconductor—polycrystalline diamond interface. The process route of the diode heterostructures includes the fabrication of nanometer masks and nanometer cone (tip) arrays, as well as plasma-assisted growth of polycrystalline diamond films on the surface of structures with nanometer cone arrays. In field-emission diodes thus formed, a current density as high as 20 A/cm2 is achieved at a threshold of field emission from the nanotip arrays into the diamond of about 0.5 V.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. K. Veda, M. Kasu, Y. Yamauchi, et al., IEEE Electron Device Lett. 27, 570 (2006).

    Article  ADS  Google Scholar 

  2. N. Vikulov and N. Kichaeva, Elektronika: Nauka Tekhnol. Biznes, No. 5, 70 (2008).

    Google Scholar 

  3. J. K. Ha, B. H. Chung, S. Y. Han, et al., J. Vac. Sci. Technol. B 20, 2080 (2002).

    Article  Google Scholar 

  4. N. De Jonge and J. M. Bonard, Philos. Trans. R. Soc. London 362, 2239 (2004).

    Article  ADS  Google Scholar 

  5. E. A. Il’ichev, V. N. Inkin, D. M. Migunov, G. N. Petrukhin, E. A. Poltoratskii, G. S. Rychkov, and D. V. Shkodin, Tech. Phys. Lett. 36, 170 (2010).

    Article  ADS  Google Scholar 

  6. V. V. Dvorkin, N. N. Dzbanovsky, N. V. Suetin, E. A. Poltoratsky, G. S. Richkov, E. A. Il’ichev, and S. A. Gavrilov, Diamond Relat. Mater. 12, 2208 (2003).

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. National Research University of Electronic Technology MIET, Zelenograd, Moscow, 124460, Russia

    V. A. Bespalov, E. A. Il’ichev, A. E. Kuleshov, D. M. Migunov, R. M. Nabiev, G. N. Petrukhin, G. S. Rychkov, O. A. Sakharov & Yu. V. Shcherbakhin

Authors
  1. V. A. Bespalov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. E. A. Il’ichev
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. E. Kuleshov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. D. M. Migunov
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. R. M. Nabiev
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. G. N. Petrukhin
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. G. S. Rychkov
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. O. A. Sakharov
    View author publications

    You can also search for this author in PubMed Google Scholar

  9. Yu. V. Shcherbakhin
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to E. A. Il’ichev.

Additional information

Original Russian Text © V.A. Bespalov, E.A. Il’ichev, A.E. Kuleshov, D.M. Migunov, R.M. Nabiev, G.N. Petrukhin, G.S. Rychkov, O.A. Sakharov, Yu.V. Shcherbakhin, 2014, published in Zhurnal Tekhnicheskoi Fiziki, 2014, Vol. 84, No. 10, pp. 112–116.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Bespalov, V.A., Il’ichev, E.A., Kuleshov, A.E. et al. Field-emission diodes based on semiconductor—polycrystalline diamond heterojunctions. Tech. Phys. 59, 1531–1535 (2014). https://doi.org/10.1134/S1063784214100090

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063784214100090

Keywords

Search

Navigation