Abstract
Three series of Al2O3 coating samples are fabricated by microarc oxidation under various deposition conditions and are studied by scanning electron microscopy (SEM) in combination with energy-dispersive x-ray spectroscopy (EDXS), Rutherford backscattering, and X-ray diffraction. Defects and pores in the coatings are analyzed by positron annihilation spectroscopy at room temperature without vacuum. No nanometer pores are detected in the coatings. When changing the electrolyte-plasma oxidation conditions, one can change the concentration and the ratio of the types of vacancy defects in these Al2O3 coatings.
References
A. L. Yerokhin, X. Nie, A. Leyland, A. Metthews, and S. J. Dowey, Surf. Coat. Technol. 122, 73 (1999).
A. D. Pogrebnyak and Yu. N. Tyurin, Tech. Phys. 47, 1463 (2002).
Yu. N. Tyurin and A. D. Pogrebnjak Surf. Coat. Technol. 141-144, 293 (2001).
A. D. Pogrebnyak and Yu. N. Tyurin, Tech. Phys. 49, 1064 (2004).
A. D. Pogrebnjak, Sh. M. Ruzimov, D. L. Alontseva, et al., Vacuum 81, 1243 (2007).
V. I. Grafutin, O. V. Ilyukhina, G. G. Myasishcheva, E. P. Prokop’ev, S. P. Timoshenkov, Yu. V. Funtikov, and R. Burtsl, Yad. Fiz. 72, 1730 (2009).
J. Kansy, Mater. Sci. Forum 652, 363 (2001).
R. Krause-Rehberg and H. S. Leipner, Positron Annihilation in Semiconductors (Springer, Berlin, 1999).
N. Djourelov, C. A. Palacio, J. de Baerdemaeker, et al., J. Phys.: Condens. Matter 20, 95206 (2008).
C. H. Shek, T. S. Gu, G. M. Lin, and J. K. L. Lai, Appl. Phys. A 66, 413 (1998).
C. Dauwe and M. Tsumbu, Phys. Rev. B 45, 9 (1992).
W. Engelhart, W. Dreher, O. Eibl, and V. Schier, Acta Mater. 59, 7757 (2011).
E. Volceanov, A. Volceanov, and S. Stoleriu, J. Eur. Ceram. Soc. 27, 759 (2007).
T. Isobe, K. Daimon, and T. Sato, Ceram. Int. 34, 213 (2008).
J. Musil, J. Blazek, P. Zeman, S. Proksova, M. Sasek, and R. Cerstvy, Appl. Surf. Sci. 257, 1058 (2010).
A. D. Pogrebnyak, O. P. Kul’ment’eva, A. P. Kobzev, Yu. N. Tyurin, S. I. Golovenko, and A. G. Boiko, Tech. Phys. Lett. 29, 312 (2003).
A. D. Pogrebnyak, M. K. Kylyshkanov, Yu. N. Tyurin, and A. Sh. Kaverina, Tech. Phys. 57, 840 (2012).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © A.D. Pogrebnyak, F.F. Komarov, A.Sh. Kaverina, O.V. Sobol’, Yu.N. Tyurin, A.I. Kupchishin, M.K. Kylyshkanov, 2013, published in Zhurnal Tekhnicheskoi Fiziki, 2013, Vol. 83, No. 11, pp. 142–145.
Rights and permissions
About this article
Cite this article
Pogrebnyak, A.D., Komarov, F.F., Kaverina, A.S. et al. Effect of the deposition parameters on the structure and physicochemical properties of protective Al2O3 coatings. Tech. Phys. 58, 1688–1691 (2013). https://doi.org/10.1134/S1063784213110200
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063784213110200