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Crystallization and thermochromism of annealed heterostructures containing titanium and tungsten oxide films

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Abstract

Crystalline phases in heterostructures containing titanium and tungsten oxide films are studied after step annealing in vacuum at temperatures between 500 and 750°C. The films are deposited on a silica glass substrate by dc reactive magnetron sputtering. It is found that crystalline phases in single layers and bilayer structures form in a different way. In the latter, crystallization is influenced by the order of layer arrangement on the substrate. Thermochromism in structures annealed in vacuum is due to the oxygen-deficient phase WO3 − x belonging to the hexagonal syngony. This phase intensely grows as the temperature rises from 650 to 750°C.

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Authors and Affiliations

  1. St. Petersburg State Electrotechnical University LETI, ul. Prof. Popova 5, St. Petersburg, 197238, Russia

    V. I. Shapovalov, A. E. Komlev & A. A. Komlev

  2. Grebenshchikov Institute of Silicate Chemistry, Russian Academy of Sciences, nab. Admirala Makarova 2, St. Petersburg, 199034, Russia

    A. E. Lapshin & M. Yu. Arsent’ev

Authors
  1. V. I. Shapovalov
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  2. A. E. Lapshin
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  3. A. E. Komlev
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  4. M. Yu. Arsent’ev
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  5. A. A. Komlev
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Correspondence to V. I. Shapovalov.

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Original Russian Text © V.I. Shapovalov, A.E. Lapshin, A.E. Komlev, M.Yu. Arsent’ev, A.A. Komlev, 2013, published in Zhurnal Tekhnicheskoi Fiziki, 2013, Vol. 83, No. 9, pp. 73–83.

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Shapovalov, V.I., Lapshin, A.E., Komlev, A.E. et al. Crystallization and thermochromism of annealed heterostructures containing titanium and tungsten oxide films. Tech. Phys. 58, 1313–1322 (2013). https://doi.org/10.1134/S1063784213090247

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  • DOI: https://doi.org/10.1134/S1063784213090247

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