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Microdetermination of titanium on the developed silicon surface using cells made of perfluorinated proton-conducting membranes

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Abstract

A technique for microdetermination of titanium on the developed silicon surface is suggested. In this technique, thin titanium layers are dissolved in an aqueous solution of hydrofluoric acid and then the resulting solutions are analyzed using potentiometric cells made of perfluorinated proton-conducting membranes. The feasibility of estimation of titanium on the silicon surface in amounts of 5 × 10−7 mol or less is demonstrated.

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Authors and Affiliations

  1. Ioffe Physical Technical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, St. Petersburg, 194021, Russia

    S. E. Nikitin, E. I. Terukov, O. I. Kon’kov & A. V. Bobyl’

  2. OAO Plastopolimer, Polyustrovskii pr. 32, St. Petersburg, 195197, Russia

    S. V. Timofeev

Authors
  1. S. E. Nikitin
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  2. E. I. Terukov
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  3. O. I. Kon’kov
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  4. A. V. Bobyl’
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  5. S. V. Timofeev
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Corresponding author

Correspondence to S. E. Nikitin.

Additional information

Original Russian Text © S.E. Nikitin, E.I. Terukov, O.I. Kon’kov, A.V. Bobyl’, S.V. Timofeev, 2013, published in Zhurnal Tekhnicheskoi Fiziki, 2013, Vol. 83, No. 5, pp. 147–150.

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Nikitin, S.E., Terukov, E.I., Kon’kov, O.I. et al. Microdetermination of titanium on the developed silicon surface using cells made of perfluorinated proton-conducting membranes. Tech. Phys. 58, 766–769 (2013). https://doi.org/10.1134/S1063784213050149

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  • DOI: https://doi.org/10.1134/S1063784213050149

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