Abstract
The method of integrated evaluation of quality of optical diffraction image is proposed. It uses several scalar parameters defined by integral comparison of two functions on the image surface. The first function represents real distribution of electric energy density on this surface, and can be simulated by the solution of corresponding exact or approximate diffraction problem of image formation. The second function describes required energy distribution on the given surface. The method is demonstrated by the example of evaluation of images formed by contactless printing from a mask in optical lithography, where the image function is computed by the known exact solution of plane wave diffraction by a slot in a conducting screen.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
I. Brodie and J. J. Muray, The Physics of Microfabrication (Plenum, New York, 1982; Mir, Moscow, 1985), pp. 249–348.
H. J. Levinson, Principles of Lithography (SPIE, Washington, 2010).
C. A. Mack, Fundamental Principles of Optical Lithography: Science of Microfabrication (Wiley, London, 2007).
B. J. Lin, Optical Lithography: Here is Why (SPIE, Bellingham, 2010).
M. S. Yeung and E. Barouch, IEEE Electron Device Lett. 21, 433 (2000).
M. S. Yeung, IEEE Trans. Semicond. Manuf. 13, 24 (2000).
M. Born and E. Wolf, Principles of Optics (Pergamon, Oxford, 1969; Nauka, Moscow 1973).
R. H. T. Bates and M. J. McDonnell, Image Restoration and Reconstruction (Oxfordsk. Univ., 1986; Mir, Moscow, 1989).
A. K. Wong and A. R. Neureuther, IEEE Trans. Semicond. Manuf. 8, 419 (1995).
K. D. Lucas, H. Tanabe, and A. J. Strojwas, J. Opt. Soc. Am. A 13, 2187 (1996).
L. N. Litvinenko and S. L. Prosvirnin, Spectral Scattering Operators in Problems of Wave Diffraction by Plane Screens (Naukova Dumka, Kiev, 1984), pp. 144–174.
V. M. Serdyuk, Tech. Phys. 50, 1076 (2005).
A. S. Rudnitsky and V. M. Serdyuk, Prog. Electromagn. Res. 86, 277 (2008).
V. M. Serdyuk and J. A. Titovitsky, Prog. Electromagn. Res. 12, 205 (2010).
Physical Properties of Polymers: Handbook, Ed. by J. E. Mark (Springer, Berlin, 2007), Part 9, pp. 965–979.
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © A.S. Rudnitsky, V.M. Serdyuk, 2012, published in Zhurnal Tekhnicheskoi Fiziki, 2012, Vol. 82, No. 10, pp. 65–71.
Rights and permissions
About this article
Cite this article
Rudnitsky, A.S., Serdyuk, V.M. Integrated evaluation of diffraction image quality in optical lithography using the rigorous diffraction solution for a slot. Tech. Phys. 57, 1387–1393 (2012). https://doi.org/10.1134/S1063784212100180
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063784212100180