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Two-electrode charged particle energy analyzer with a quasi-linear electrostatic field

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Abstract

A simple design of an electrostatic secondary electron energy analyzer suggested by the author is studied theoretically. The analyzer consists of two, planar and dihedral, electrodes. A formula for the potential distribution in this device is derived. The parameters of the analyzer operating as a spectrometer and a spectrograph are numerically calculated. The device is intended for determining the surface composition of the sample irradiated by primary electrons or X rays.

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Authors and Affiliations

  1. Ioffe Physical Technical Institute, Russian Academy of Sciences, ul. Politekhnicheskaya 26, St. Petersburg, 194021, Russia

    T. Ya. Fishkova

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  1. T. Ya. Fishkova
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Correspondence to T. Ya. Fishkova.

Additional information

Original Russian Text © T.Ya. Fishkova, 2012, published in Zhurnal Tekhnicheskoi Fiziki, 2012, Vol. 82, No. 5, pp. 154–156.

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Fishkova, T.Y. Two-electrode charged particle energy analyzer with a quasi-linear electrostatic field. Tech. Phys. 57, 730–732 (2012). https://doi.org/10.1134/S106378421205009X

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  • DOI: https://doi.org/10.1134/S106378421205009X

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