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Diagnostics of the atmospheric-pressure plasma parameters using the method of near-field microwave sounding

  • Gas Discharges, Plasma
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Abstract

A method of resonant near-field microwave probing is developed for contactless diagnostics of a high-pressure plasma. The efficiency of this method in measuring the parameters of the plasma of an rf capacitive discharge in argon under atmospheric pressure is demonstrated. The experimental results are compared with the data obtained using the independent method, the microwave radiation “cutoff,” and with theoretical estimates.

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Authors and Affiliations

  1. Institute of Applied Physics, Russian Academy of Sciences, ul. Ul’yanova 46, Nizhni Novgorod, 603950, Russia

    D. V. Yanin, A. V. Kostrov, A. I. Smirnov, M. E. Gushchin, S. V. Korobkov, A. V. Strikovskii, V. I. Gundorin, V. V. Nazarov & M. V. Starodubtsev

Authors
  1. D. V. Yanin
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  2. A. V. Kostrov
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  3. A. I. Smirnov
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  4. M. E. Gushchin
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  5. S. V. Korobkov
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  6. A. V. Strikovskii
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  7. V. I. Gundorin
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  8. V. V. Nazarov
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  9. M. V. Starodubtsev
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Corresponding author

Correspondence to D. V. Yanin.

Additional information

Original Russian Text © D.V. Yanin, A.V. Kostrov, A.I. Smirnov, M.E. Gushchin, S.V. Korobkov, A.V. Strikovskii, V.I. Gundorin, V.V. Nazarov, M.V. Starodubtsev, 2012, published in Zhurnal Tekhnicheskoi Fiziki, 2012, Vol. 82, No. 4, pp. 48–57.

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Yanin, D.V., Kostrov, A.V., Smirnov, A.I. et al. Diagnostics of the atmospheric-pressure plasma parameters using the method of near-field microwave sounding. Tech. Phys. 57, 468–477 (2012). https://doi.org/10.1134/S1063784212040251

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  • DOI: https://doi.org/10.1134/S1063784212040251

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