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Properties of low-refractive-index films obtained by the close-spaced vapor transport technique under the sublimation of graphite in a quasi-closed volume

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Abstract

The properties of low-refractive-index carbon films obtained by close-spaced vapor transport at graphite sublimation are studied. The optical properties of the films are investigated by monochromatic multiple-angle ellipsometry, and their morphology is examined by AFM. It is found that the films have a columnar structure with a background surface roughness of about 1 nm. In addition, the surface of the film contains islands up to 50 nm in height with a footprint of ≈200 nm. A low-refractive-index carbon film deposited by close-spaced vapor transport on silicon tips is found to decrease the field emission threshold and drastically raise the current.

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References

  1. Y. Lifshitz, Diamond Relat. Mater. 5, 388 (1996).

    Article  ADS  Google Scholar 

  2. D. Camino, A. H. S. Jones, D. Mercs, and D. G. Teer, Vacuum 52, 125 (1999).

    Article  Google Scholar 

  3. V. G. Litovchenko, Fiz. Khim. Tverd. Tela 5, 9 (2004).

    Google Scholar 

  4. T. V. Semikina, Optoelektron. Poluprovod. Tekh. (Kiev), No. 41, 121 (2006).

  5. A. I. Popov and V. A. Vorontsov, Fiz. Tekh. Poluprovodn. (St. Petersburg) 35, 665 (2001) [Semiconductors 35, 637 (2001)].

    Google Scholar 

  6. V. S. Khomchenko, N. V. Sopinskii, A. K. Savin, O. S. Litvin N. S. Zayats, V. B. Khachatryan, and A. A. Korchevoi, Zh. Tekh. Fiz. 78(6), 84 (2008) [Tech. Phys. 53, 757 (2008)].

    Google Scholar 

  7. M. P. Siegal, D. L. Overmyer, and P. P. Provencio, Appl. Phys. Lett. 80, 2171 (2002).

    Article  ADS  Google Scholar 

  8. B. S. Satyanarayana, J. Robertson, and W. I. Milne, J. Appl. Phys. 87, 3126 (2000).

    Article  ADS  Google Scholar 

  9. R. M. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977; Mir, Moscow, 1981).

    Google Scholar 

  10. N. V. Sopinskii, Mikroelektronika 30, 41 (2001) [Russian Microelectronics 30, 35 (2001)].

    Google Scholar 

  11. M. V. Sopinskyy, P. E. Shepelyavyi, A. V. Stronski, and E. F. Venger, J. Opt. Adv. Mater. 7, 2255 (2005).

    Google Scholar 

  12. N. A. Semenenko, Candidate’s Dissertation (Kiev, 2008).

  13. L. A. Golovan’, P. K. Kashkarov, and V. Yu. Timoshenko, Kristallografiya 52, 697 (2007) [Crystallogr. Rep. 52, 672 (2007)].

    Google Scholar 

  14. V. Litovchenko, A. Evtukh, Yu. Kryuchenko, N. Goncharuk, O. Yilmazoglu, K. Mutamba, H. L. Hartnagel, and D. Pavlidis, J. Appl. Phys. 96, 866 (2004).

    Article  ADS  Google Scholar 

  15. A. A. Evtukh, N. I. Klyui, V. G. Litovchenko, A. N. Luk’yanov, B. O. Movchan, and Yu. P. Piryatinskii, Optoelektron. Poluprovod. Tekh. (Kiev), No. 41, 100 (2006).

  16. A. A. Evtukh, M. I. Klyui, L. A. Krushins’ka, Yu. A. Kurapov, V. G. Litovchenko, A. M. Luk’yanov, B. O. Movchan, and M. O. Semenenko, Ukr. Fiz. Zh. 53, 179 (2008).

    Google Scholar 

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Authors and Affiliations

  1. Lashkarev Institute of Semiconductor Physics, National Academy of Sciences of Ukraine, pr. Nauki 45, Kiev, 03028, Ukraine

    N. V. Sopinskii, V. S. Khomchenko, O. S. Litvin, A. K. Savin, N. A. Semenenko, A. A. Evtukh, V. P. Sobolevskii & G. P. Ol’khovik

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  1. N. V. Sopinskii
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  2. V. S. Khomchenko
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  3. O. S. Litvin
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  4. A. K. Savin
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  5. N. A. Semenenko
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  6. A. A. Evtukh
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  7. V. P. Sobolevskii
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  8. G. P. Ol’khovik
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Correspondence to N. V. Sopinskii.

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Original Russian Text © N.V. Sopinskii, V.S. Khomchenko, O.S. Litvin, A.K. Savin, N.A. Semenenko, A.A. Evtukh, V.P. Sobolevskii, G.P. Ol’khovik, 2011, published in Zhurnal Tekhnicheskoi Fiziki, 2011, Vol. 81, No. 11, pp. 125–129.

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Sopinskii, N.V., Khomchenko, V.S., Litvin, O.S. et al. Properties of low-refractive-index films obtained by the close-spaced vapor transport technique under the sublimation of graphite in a quasi-closed volume. Tech. Phys. 56, 1665–1669 (2011). https://doi.org/10.1134/S1063784211110259

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  • DOI: https://doi.org/10.1134/S1063784211110259

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