Abstract
Problems in computer-aided design of 3D optical systems for charged particle optics are analyzed. The results of simulation of electron-optical systems of optoelectronic transducers with two cathode packs (spherical cathode-plane fine-structure grid as the accelerating electrode and plane cathode-spherical fine-structure grid) are considered. We note a low technological efficiency of such structures and unsatisfactory quality (as it regards some parameters) of the image being recorded due to spherical electrodes and a fine-structure grid in the cathode pack. Numerical analysis of the effect of adjustment of the design on the quality of the image being recorded is carried out.
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Original Russian Text © L.V. Bad’in, S.K. Demin, S.I. Safronov, R.P. Tarasov, 2011, published in Zhurnal Tekhnicheskoĭ Fiziki, 2011, Vol. 81, No. 8, pp. 98–106.
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Bad’in, L.V., Demin, S.K., Safronov, S.I. et al. Computer design of electrostatic systems of charge particle optics: Systems with spherical electrodes and a fine-structure grid. Tech. Phys. 56, 1158–1166 (2011). https://doi.org/10.1134/S1063784211080032
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DOI: https://doi.org/10.1134/S1063784211080032