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Aerosol deposition of detonation nanodiamonds used as nucleation centers for the growth of nanocrystalline diamond films and isolated particles

Technical Physics volume 56, pages 718–724 (2011)Cite this article

Abstract

The aerosol deposition of detonation nanodiamonds (DNDs) on a silicon substrate is comprehensively studied, and the possibility of subsequent growth of nanocrystalline diamond films and isolated particles on substrates coated with DNDs is demonstrated. It is shown that a change in the deposition time and the weight concentration of DNDs in a suspension in the range 0.001–1% results in a change in the shape of DND agglomerates and their number per unit substrate surface area N s from 108 to 1011 cm−2. Submicron isolated diamond particles are grown on a substrate coated with DND agglomerates at N s ≈ 108 cm−2 using microwave plasma-enhanced chemical vapor deposition. At N s ≈ 1010 cm−2, thin (∼100 nm) nanodiamond films with a root-mean-square surface roughness less than 15 nm are grown.

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Authors and Affiliations

  1. Ioffe Physical-Technical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, St. Petersburg, 194021, Russia

    N. A. Feoktistov, V. I. Sakharov, I. T. Serenkov, V. A. Tolmachev, I. V. Korkin, A. E. Aleksenskii, A. Ya. Vul’ & V. G. Golubev

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  1. N. A. Feoktistov
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  2. V. I. Sakharov
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  3. I. T. Serenkov
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  4. V. A. Tolmachev
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  5. I. V. Korkin
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  6. A. E. Aleksenskii
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  7. A. Ya. Vul’
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  8. V. G. Golubev
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Correspondence to V. G. Golubev.

Additional information

Original Russian Text © N.A. Feoktistov, V.I. Sakharov, I.T. Serenkov, V.A. Tolmachev, I.V. Korkin, A.E. Aleksenskii, A.Ya. Vul’, V.G. Golubev, 2011, published in Zhurnal Tekhnicheskoĭ Fiziki, 2011, Vol. 81, No. 5, pp. 132–138.

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Feoktistov, N.A., Sakharov, V.I., Serenkov, I.T. et al. Aerosol deposition of detonation nanodiamonds used as nucleation centers for the growth of nanocrystalline diamond films and isolated particles. Tech. Phys. 56, 718–724 (2011). https://doi.org/10.1134/S1063784211050112

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  • DOI: https://doi.org/10.1134/S1063784211050112

Keywords

  • Silicon Substrate
  • Scanning Probe Microscope
  • Weight Concentration
  • Aerosol Deposition
  • Diamond Phase