Skip to main content
SpringerLink
Log in

Stopping cross sections of 50- to 230-keV nitrogen ions in silicon measured by ion backscattering spectroscopy

  • Atoms, Spectra, Radiation
  • Published:
Technical Physics Aims and scope Submit manuscript

Abstract

The energy dependence of the total stopping cross section of 50- to 230-keV nitrogen ions in silicon (σ S (E)) is measured in order to develop the diagnostics of heavy impurities in films of a nanometer thickness by heavy ion backscattering (HIBS) spectroscopy. At ion energies lower than 150 keV, this σ S (E) dependence occupies an intermediate position between the dependences given in the SRIM and MSTAR data-bases; at higher energies, our dependence is closer to the former dependence. The estimation of the effect of inelastic processes on the stopping cross section demonstrates that the effect of these processes for nitrogen ions can be neglected when heavy impurities in such films are studied by HIBS.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. D. Huttner, U. Gunter, D. Meyer, D. Reiner, and G. Linker, Appl. Phys. Lett. 65, 2863 (1994).

    Article  ADS  Google Scholar 

  2. V. V. Afrosimov, G. O. Dzyuba, R. N. Il’in, M. N. Panov, V. I. Sakharov, I. T. Serenkov, and E. A. Ganza, Zh. Tekh. Fiz. 66(12), 76 (1996) [Tech. Phys. 42, 412 (1996)].

    Google Scholar 

  3. B. L. Doule, J. A. Knapp, and D. L. Buller, Nucl. Instrum. Methods Phys. Res. B 42, 295 (1989).

    Article  ADS  Google Scholar 

  4. G. Braunstein, M. Duffy, S. Maina, B. Tonner, and J. C. Banks, Nucl. Instrum. Methods Phys. Res. B 219–220, 358 (2004).

    Article  Google Scholar 

  5. D. V. Denisov, I. T. Serenkov, V. I. Sakharov, G. E. Tsirlin, and V. M. Ustinov, Fiz. Tverd. Tela (St. Petersburg) 45, 2090 (2003) [Phys. Solid State 45, 2194 (2003)].

    Google Scholar 

  6. H. Paul and A. Schinner, Nucl. Instrum. Methods Phys. Res. B 209, 252 (2003).

    Article  ADS  Google Scholar 

  7. J. F. Ziegler, Nucl. Instrum. Methods Phys. Res. B 219–220, 1027 (2004).

    Article  Google Scholar 

  8. J. F. Zeigler, http://www.srim.org

  9. J. F. Zeigler, J. Biersack, and U. Littmark, The Stopping and Ranges of Ions in Matter (Pergamon, Oxford, 1985).

    Google Scholar 

  10. H. Paul and A. Schinner, At. Data Nucl. Data Tables 85, 377 (2003).

    Article  ADS  Google Scholar 

  11. H. Paul and A. Schinner, Nucl. Instrum. Methods Phys. Res. B 179, 299 (2001).

    Article  ADS  Google Scholar 

  12. H. Paul and A. Schinner, Nucl. Instrum. Methods Phys. Res. B 195, 166 (2002).

    Article  ADS  Google Scholar 

  13. H. Paul, http://www.exphys.uni-linz.ac.at/stopping.

  14. P. Bauer, Nucl. Instrum. Methods Phys. Res. B 27, 301 (1987).

    Article  ADS  Google Scholar 

  15. V. V. Afrosimov, R. N. Il’in, S. F. Karmanenko, V. I. Sakharov, and Serenkov, Fiz. Tverd. Tela (St. Petersburg) 45, 2030 (2003) [Phys. Solid State 45, 1122 (2003)].

    Google Scholar 

  16. P. Bauer, D. Semrad, and P. Mertens, Nucl. Instrum. Methods Phys. Res. B 12, 56 (1985).

    Article  ADS  Google Scholar 

  17. W. N. Lennard and H. Geissel, Nucl. Instrum. Methods Phys. Res. B 27, 338 (1987).

    Article  ADS  Google Scholar 

  18. D. Niemann, G. Konac, and S. Kalbitzer, Nucl. Instrum. Methods Phys. Res. B 118, 11 (1990).

    Article  Google Scholar 

  19. P. Sigmund and K. B. Winterbon, Nucl. Instrum. Methods 119, 541 (1974).

    Article  ADS  Google Scholar 

  20. V. V. Afrosimov, R. N. Il’in, S. F. Karmanenko, A. A. Malkov, V. I. Sakharov, and I. T. Serenkov, Thin Solid Films 492, 146 (2005).

    Article  ADS  Google Scholar 

  21. V. V. Afrosimov, R. N. Il’in, S. F. Karmanenko, V. I. Sakharov, A. A. Semenov, I. T. Serenkov, and D. V. Yanovskii, Fiz. Tverd. Tela (St. Petersburg) 41, 588 (1999) [Phys. Solid State 41, 527 (1999)].

    Google Scholar 

  22. J. F. Janni, At. Data Nucl. Data Tables 27, 341 (1982).

    Article  ADS  Google Scholar 

  23. Q. Yang and D. J. O’Connor, Nucl. Instrum. Methods Phys. Res. B 61, 1409 (1991).

    Article  Google Scholar 

  24. H. Grahmann and S. Kalbitzer, Nucl. Instrum. Methods 132, 119 (1976).

    Article  ADS  Google Scholar 

  25. S. Kalbitzer, H. Oetzmann, H. Grahmann, and A. Feuerstein, Z. Phys. A 278, 223 (1976).

    Article  Google Scholar 

  26. D. C. Santry and R. D. Werner, Nucl. Instrum. Methods Phys. Res. B 53, 7 (1991).

    Article  ADS  Google Scholar 

  27. D. Semrad and P. Bauer, Nucl. Instrum. Methods Phys. Res. B 12, 24 (1985).

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Ioffe Physico-Technical Institute, Russian Academy of Sciences, Politekhnicheskaya ul. 26, St. Petersburg, 194021, Russia

    V. V. Afrosimov, D. V. Denisov, R. N. Il’in, V. I. Sakharov & I. T. Serenkov

Authors
  1. V. V. Afrosimov
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. D. V. Denisov
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. R. N. Il’in
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. V. I. Sakharov
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. I. T. Serenkov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to R. N. Il’in.

Additional information

Original Russian Text © V.V. Afrosimov, D.V. Denisov, R.N. Il’in, V.I. Sakharov, I.T. Serenkov, 2009, published in Zhurnal Tekhnicheskoĭ Fiziki, 2009, Vol. 79, No. 6, pp. 21–27.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Afrosimov, V.V., Denisov, D.V., Il’in, R.N. et al. Stopping cross sections of 50- to 230-keV nitrogen ions in silicon measured by ion backscattering spectroscopy. Tech. Phys. 54, 783–789 (2009). https://doi.org/10.1134/S1063784209060048

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S1063784209060048

PACS numbers

Search

Navigation