Abstract
Self-sputtering of plane-parallel layers is described theoretically on the basis of the invariant immersion method combined with the discrete flow technique. Differential equations are derived for forward and backward self-sputtering functions, and exact solutions to these equations are obtained. Energy distributions of self-sputtered ions are calculated; total self-sputtering coefficients are compared to the results of computer experiment. The dependences of the total self-sputtering coefficients on the film thickness and the initial energy of ions are analyzed.
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Original Russian Text © A.A. Barat, V.V. Manukhin, 2009, published in Zhurnal Tekhnicheskoĭ Fiziki, 2009, Vol. 79, No. 2, pp. 117–124.
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Barat, A.A., Manukhin, V.V. Calculation of self-sputtering spectra of thin films by the discrete flow method. Tech. Phys. 54, 281–288 (2009). https://doi.org/10.1134/S1063784209020194
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DOI: https://doi.org/10.1134/S1063784209020194