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IR spectroscopy of diamondlike silicon-carbon films

  • Surface, Electron and Ion Emission
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Abstract

IR spectra of metal-containing diamondlike silicon-carbon films are taken for the first time. It is shown that the optical response from the subsystem of free charge carriers in chromium-containing films can be described in terms of a simple model that deals with carriers localized inside clusters several nanometers in size. The data obtained indicate that the electric and dielectric properties of the films can be controlled by technological means during their synthesis and by varying the size, concentration, and conductivity of metallic nanoclusters.

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Correspondence to B. P. Gorshunov.

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Original Russian Text © B.P. Gorshunov, M.L. Shupegin, V.Yu. Ivanov, A.S. Prokhorov, I.E. Spektor, A.A. Volkov, 2008, published in Zhurnal Tekhnicheskoĭ Fiziki, 2008, Vol. 78, No. 5, pp. 111–115.

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Gorshunov, B.P., Shupegin, M.L., Ivanov, V.Y. et al. IR spectroscopy of diamondlike silicon-carbon films. Tech. Phys. 53, 641–645 (2008). https://doi.org/10.1134/S1063784208050186

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  • DOI: https://doi.org/10.1134/S1063784208050186

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