Abstract
Possible athermic processes caused by microwave processing (at f = 2.45 and 84 GHz) of semiconductors that influence their structure are analyzed. Models explaining the variation of the concentration of point and extended defects upon microwave irradiation are proposed. These models are qualitatively corroborated by experimental data for the structure and luminescence of semiconductors.
Similar content being viewed by others
References
A. E. Belyaev, A. A. Belyaev, E. F. Venger, et al., in Proceedings of the 6th International Crimean Microwave Conference (CriMiCo’2002), Sevastopol, Crimea, 1996, pp. 71–89.
Yu. Breza, V.V. Milenin, R. V. Konakova, et al., Poverkhnost: Rentgenoskie, Sinkhrotronnye, Neĭtronnye Issled., No. 10, 83 (1997).
D. E. Abdurakhimov, F. Sh. Vakhidov, V. L. Vereshchagin, et al., Mikroelektronika 20, 22 (1991).
D. E. Abdurakhimov, P. N. Bochikashvili, V. L. Vereshchagin, et al., Mikroelektronika 21, 82 (1992).
V. I. Pashkov, V. A. Perevoshchikov, and V. D. Skupov, Pis’ma Zh. Tekh. Fiz. 20(8), 14 (1999) [Tech. Phys. Lett. 20, 310 (1999)].
P. I. Polukhin, G. S. Gorelik, and V. K. Vorontsov, Physical Principles of Plastic Deformation (Metallurgiya, Moscow, 1982; URSS, Moscow, 2007).
J. Friedel, Dislocations (Pergamon, Oxford, 1964; Mir, Moscow, 1967).
R. P. Rhodes, Imperfections and Active Centers in Semiconductors (Pergamon, Oxford, 1964; Metallurgiya, Moscow, 1968).
Yu. A. Kontsevoĭ, Yu. M. Litvinov, and É. A. Fattakhov, Plasticity and Strength of Semiconductor Materials and Structures (Radio i Svyaz’, Moscow, 1982) [in Russian].
V. I. Smirnov, A Course of Higher Mathematics (Nauka, Moscow, 1974; Addison-Wesley, Reading, 1964), Vol. 2.
V. A. Vdovenkov and S. P. Prokof’eva, Zh. Tekh. Fiz. 61(9), 67 (1991) [Sov. Phys. Tech. Phys. 36, 1005 (1991)].
N. P. Bogoroditskiĭ, Yu. T. Volokobinskiĭ, A. N. Vorob’ev, and B. M. Tareev, Theory of Dielectrics (Énergiya, Moscow, 1965) [in Russian].
R. V. Konakova, V. V. Milenin, D. I. Voitsikhovskyi, et al., Semicond. Phys. Quant. Electron. Optoelectron. 4, 298 (2001).
Yu. V. Bykov, Available from VINITI, No. 2332-V91 (Moscow, 1991).
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © I.B. Ermolovich, G.V. Milenin, V.V. Milenin, R.V.Konakova, R.A. Red’ko, 2007, published in Zhurnal Tekhnicheskoĭ Fiziki, 2007, Vol. 77, No. 9, pp. 71–75.
Rights and permissions
About this article
Cite this article
Ermolovich, I.B., Milenin, G.V., Milenin, V.V. et al. Modification of the defect structure in binary semiconductors under the action of microwave radiation. Tech. Phys. 52, 1173–1177 (2007). https://doi.org/10.1134/S1063784207090113
Received:
Issue Date:
DOI: https://doi.org/10.1134/S1063784207090113