Abstract
A method is presented for the deposition of smooth epitaxial high-T c superconducting films using a pulsed infrared YAG: Nd3+ laser and velocity filtration. This method is based on the removal of drops and solid particles from the flow of deposited substance with a fast shutter made of a rotating disk. The deposited smooth homogeneous YBa2Cu3O7−δ films have a critical temperature T c > 90 K. The surface concentration of drops is less than 3 × 102 cm−2, and their amount is decreased by more than six orders of magnitude.
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Original Russian Text © A.V. Varlashkin, S.I. Krasnosvobodtsev, M.L. Chukharkin, O.V. Snigirev, A.V. Tsikunov, N.P. Shabanova, 2007, published in Zhurnal Tekhnicheskoĭ Fiziki, 2007, Vol. 77, No. 5, pp. 127–129.
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Varlashkin, A.V., Krasnosvobodtsev, S.I., Chukharkin, M.L. et al. Deposition of smooth high-T c superconducting films with a solid-state YAG: Nd3+ laser. Tech. Phys. 52, 660–662 (2007). https://doi.org/10.1134/S1063784207050192
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DOI: https://doi.org/10.1134/S1063784207050192