Abstract
The melting and crystallization of single-crystal silicon wafers exposed to compression plasma flows generated by quasi-stationary plasma accelerators are studied by numerical simulation. The results include the phase transition kinetics described on the basis of the Kolmogorov equation. The space-time characteristics of the melting and crystallization processes for variously shaped plasma pulses are discussed. Based on the experimental data and estimates, it is concluded that thermoelectric instability plays an essential role in the formation of three-dimensional periodic structures.
Similar content being viewed by others
References
V. V. Uglov, V. M. Anishchik, V. V. Astashinskiĭ, et al., Pis’ma Zh. Éksp. Teor. Fiz. 74, 234 (2001) [JETP Lett. 74, 213 (2001)].
V. M. Astashinsky, S. I. Ananin, V. V. Askerko, et al., Vakuumn. Tekh. Tekhnol. 12(2), 91 (2002).
V. M. Astashinsky, S. I. Ananin, V. V. Askerko, et al., in Proceedings of the 29th EPS Conference on Plasma Physics and Controlled Fusion, Montreux, 2002, p. 2.027.
A. I. Morozov, Nucl. Fusion Special Suppl., S111 (1969).
S. I. Ananin, V. M. Astashinskiĭ, G. I. Bakanovich, et al., Fiz. Plazmy 16, 186 (1990) [Sov. J. Plasma Phys. 16, 65 (1990)].
E. D. Eidel’man, Usp. Fiz. Nauk 165, 1279 (1995) [Phys. Usp. 38, 1231 (1995)].
S. Yu. Karpov, Yu. V. Koval’chuk, and Yu. V. Pogorel’skiĭ, Fiz. Tekh. Poluprovodn. (Leningrad) 20, 1945 (1986) [Sov. Phys. Semicond. 20, 1221 (1986)].
R. Černy, R. Šašik, I. Lukeš, and V. Cháb, Phys. Rev. B 44, 4097 (1991).
A. A. Chernov, E. I. Givargizov, Kh. S. Bagdasarov, V. A. Kuznetsov, L. N. Dem’yanets, and A. N. Lobachev, Modern Crystallography, Vol. 3: Crystal Growth (Nauka, Moscow, 1980; Springer, Berlin, 1984).
S. P. Zhvavyĭ, Zh. Tekh. Fiz. 70(8), 58 (2000) [Tech. Phys. 45, 1014 (2000)].
V. V. Uglov, V. M. Anishchik, V. V. Astashinsky, et al., in Proceedings of the 12th International Meeting on Radiation Physics of Solid, Sevastopol, 2002, pp. 16–21.
L. N. Aleksandrov, Kinetics of Crystallization and Recrystallization of Semiconductor Films (Nauka, Novosibirsk, 1985) [in Russian].
V. Z. Belen’kiĭ, Geometric-Probabilistic Models of Crystallization (Nauka, Moscow, 1989) [in Russian].
V. P. Skripov and V. P. Koverda, Spontaneous Crystallization of Supercooled Liquids (Nauka, Moscow, 1984) [in Russian].
S. P. Zhvavyĭ, Zh. Prikl. Spektrosk. 50, 589 (1989).
A. R. Regel’ and V. M. Glazov, Physical Properties of Electronic Melts (Nauka, Moscow, 1980) [in Russian].
A. E. Bell, RCA Rev. 40, 295 (1979).
M. R. Peter, Phys. Rev. B 38, 2727 (1988).
E. D. Eĭdel’man, Teplofiz. Vys. Temp. 32, 418 (1994).
V. A. Polukhin and E. V. Alikina, Izv. Chelyabinsk. Nauchn. Tsentra, No. 1, 11 (2000).
D. Vizman, O. Grabner, and G. Miller, J. Cryst. Growth 233, 687 (2001).
H. Fujii, A. Shirali, K. Kohno, et al., in Proceedings of Spacebound Conference 2000, Vancouver, Canadian Space Agency, 2001, CD-ROM.
M. Langen, T. Hibiya, M. Eguchi, et al., J. Cryst. Growth 186, 550 (1998).
E. D. Eĭdel’man, Fiz. Tekh. Poluprovodn. (St. Petersburg) 28, 1535 (1994) [Semiconductors 28, 858 (1994)].
R. V. Birikh and R. N. Rudakov, Izv. Ross. Akad. Nauk, Mekh. Zhidk. Gaza, No. 5, 30 (1996).
Author information
Authors and Affiliations
Additional information
Original Russian Text © S.I. Ananin, V.M. Astashinsky, A.S. Emel’yanenko, E.A. Kostyukevich, A.M. Kuz’mitski, S.P. Zhvavy, V.M. Anishchik, V.V. Uglov, A.V. Pun’ko, 2006, published in Zhurnal Tekhnicheskoĭ Fiziki, 2006, Vol. 76, No. 7, pp. 34–40.
Rights and permissions
About this article
Cite this article
Ananin, S.I., Astashinsky, V.M., Emel’yanenko, A.S. et al. Melting and crystallization dynamics of single-crystal silicon exposed to compression plasma flows. Tech. Phys. 51, 853–859 (2006). https://doi.org/10.1134/S1063784206070061
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1134/S1063784206070061