Abstract
Interaction of electromagnetic radiation with metal-semiconductor nanometer structures is studied theoretically and experimentally. A technique for nondestructive multiparametric control of the electrophysical parameters of metal nanometer layers and semiconductor conductivity in metal-semiconductor structures using electromagnetic reflection and transmission spectra is proposed and tested experimentally.
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Original Russian Text © D.A. Usanov, A.V. Skripal, A.V. Abramov, A.S. Bogolyubov, 2006, published in Zhurnal Tekhnicheskoĭ Fiziki, 2006, Vol. 76, No. 5, pp. 112–117.
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Usanov, D.A., Skripal, A.V., Abramov, A.V. et al. Determination of the metal nanometer layer thickness and semiconductor conductivity in metal-semiconductor structures from electromagnetic reflection and transmission spectra. Tech. Phys. 51, 644–649 (2006). https://doi.org/10.1134/S1063784206050173
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DOI: https://doi.org/10.1134/S1063784206050173