Abstract
Studies of the effect of transition metals on the phase composition and electric and dielectric properties of diamond-like silicon–carbon films fabricated by plasma chemical decomposition of poly(phenylmethylsiloxane) are conducted. Frequency, temperature, and concentration dependences of the specified properties are obtained. It is shown that electrical conductivity continuously increases with the increase in the concentration of the metal and the concentration dependences of dielectric permeability and dielectric loss tangent have a minimum at the concentration of the metal of 0.5–2 at %. The possible reasons for this phenomenon are analyzed.
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REFERENCES
Š. Meškinis and A. Tamulevičiene, Mater. Sci. (Medžiagotyra) 17, 358 (2011).
A. I. Popov, A. D. Barinov, V. M. Emets, T. S. Chukanova, and M. L. Shupegin, Phys. Solid State 62, 1780 (2020).
F. Mangolini, B. A. Krick, T. D. B. Jacobs, S. R. Khanal, F. Streller, J. B. McClimon, J. Hilbert, S. V. Prasad, T. W. Scharf, J. A. Ohlhausen, J. R. Lukes, W. G. Sawyer, and R. W. Carpick, Carbon 130, 127 (2018). https://doi.org/10.1016/j.carbon.2017.12.096
E. V. Zavedeev, O. S. Zilova, M. L. Shupegin, A. D. Ba-rinov, N. R. Arutyunyan, T. Roch, and S. M. Pimenov, Appl. Phys. A 122, 961 (2016). https://doi.org/10.1007/s00339-016-0508-7
M. A. Velichko and Yu. P. Gladkikh, Nauch. Vedom. Belgor. Univ., Ser. Mat. Fiz., No. 6 (227), 115 (2016).
A. D. Barinov, A. I. Popov, and M. Yu. Presnyakov, Inorg. Mater. 53, 690 (2017).
A. D. Barinov, T. D. Gurinovich, A. I. Popov, T. S. Chukanova, M. A. Shapetina, and M. L. Shupegin, Inorg. Mater. 56, 799 (2020).
A. Popov, Disordered Semiconductors: Physics and Application, 2nd ed. (Pan Stanford, Singapore, 2018).
M. D. Malinkovich, Yu. N. Parkhomenko, D. S. Polyakov, and M. L. Shupegin, Mater. Elektron. Tekh. 1 (3), 41 (2010).
T. Tamulevičius, D. Tamulevičiené, A. Virganavičius, V. Vasiliauskas, Š. Kopustinskas, and S. Meškinis, Nucl. Instrum. Methods Phys. Res., Sect. B 341, 1 (2014).
M. Yu. Presnyakov, A. I. Popov, D. S. Usol’tseva, M. L. Shupegin, and A. L. Vasil’ev, Ross. Nanotekhnol. 9 (7–8), 70 (2014).
D. B. K. Sheeja, C. Q. Tay, et al., J. Mater. Sci. 38, 421 (2003).
C. Adelhelm, M. Balden, M. Rinke, et al., J. Appl. Phys. 105, 033522 (2009).
A. Bozhko, T. Takagi, and T. Takeno, J. Phys.: Condens. Matter. 16, 8447 (2004).
S. M. Pimenov, E. V. Zavedeev, N. R. Arutyunyan, O. S. Zilova, A. D. Barinov, M. Yu. Presniakov, and M. L. Shupegin, Surf. Coat. Technol. 402, 126300 (2020).
H. Frohlich, Theory of Dielectrics: Dielectric Constant and Dielectric Loss (Clarendon, Oxford, 1949).
A. K. Das, R. Hatada, and W. Ensinger, J. Alloys Compd. 758, 194 (2018).
A. I. Popov, V. P. Afanas’ev, A. D. Barinov Yu. N. Bodisko, A. S. Gryazev, I. N. Miroshnikova, M. Yu. Presnyakov, and M. L. Shupegin, J. Surf. Invest.: X-Ray Synchrotr. Neutron Tech. 13, 832 (2019).
ACKNOWLEDGMENTS
Some experimental work was performed on the equipment of the Resource Center of Probe and Electron Microscopy (Kurchatov complex of NBIKS—nature-like technologies, National Research Center “Kurchatov Institute”).
Funding
This research was financially supported by the Russian Science Foundation, RSF (research project no. 22-29-00864, https://rscf.ru/project/22-29-00864/).
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Translated by E. Boltukhina
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Popov, A.I., Barinov, A.D., Emets, V.M. et al. The Effect of Transition Metals on the Dielectric Properties of Diamond-Like Silicon–Carbon Films. Phys. Solid State 64, 85–93 (2022). https://doi.org/10.1134/S1063783422010164
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DOI: https://doi.org/10.1134/S1063783422010164