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Surface Morphology, Microstructure, and Piezoelectric Response of Perovskite Islands in Lead Zirconate Titanate Thin Films

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Abstract

Features of the microstructure and piezoelectric response of perovskite islands in a pyrochlore phase matrix in lead zirconate titanate thin films prepeared by the radio-frequency magnetron sputtering method are investigated. The radial inhomogeneity of the surface morphology and piezoresponse of the islands are revealed. The role of two-dimensional mechanical stresses acting on the thin film from the silicon substrate side is discussed.

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Funding

The work was partly supported by the Ministry for Education and Science of Russian Federation (project no. 16.2811.2017/4.6).

PFM studies were performed at Center for Shared Use “Material Science and Metallurgy” at the National University of Science and Technology MISiS and were supported state tasks of Ministry of Science and Higher Education of the Russian Federation (project no. 11.9706.2017/7.8).

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Authors and Affiliations

  1. Ioffe Institute, 194021, St. Petersburg, Russia

    I. P. Pronin, E. Yu. Kaptelov, S. V. Senkevich & V. V. Osipov

  2. Herzen State Pedagogical University of Russia, 191186, St. Petersburg, Russia

    I. P. Pronin, E. Yu. Kaptelov, S. V. Senkevich, D. A. Kiselev & V. P. Pronin

  3. National University of Science and Technology MISiS, 119049, Moscow, Russia

    D. A. Kiselev

Authors
  1. I. P. Pronin
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  2. E. Yu. Kaptelov
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  3. S. V. Senkevich
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  4. D. A. Kiselev
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  5. V. V. Osipov
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  6. V. P. Pronin
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Correspondence to I. P. Pronin.

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Translated by N. Semenova

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Pronin, I.P., Kaptelov, E.Y., Senkevich, S.V. et al. Surface Morphology, Microstructure, and Piezoelectric Response of Perovskite Islands in Lead Zirconate Titanate Thin Films. Phys. Solid State 61, 2376–2381 (2019). https://doi.org/10.1134/S1063783419120424

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  • DOI: https://doi.org/10.1134/S1063783419120424

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